Laser Patterning Window Layout for Debris-Free OLED Thin Films
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Solution Overview
Problem
Conventional thin film patterning methods for organic electroluminescence (EL) display panels are inefficient, requiring multiple steps and increasing manufacturing time and costs due to the use of photolithography and etching, and laser patterning methods face challenges with debris accumulation and processing accuracy.
Innovation Solution
A patterning device using a laser emitter and a chamber with a light transmissive window, where a cover glass is positioned closer to the substrate than the window glass to catch debris and maintain processing accuracy, allowing for efficient removal of thin films in a vacuum environment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional photolithography method is used for patterning, then patterning can be achieved, but manufacturing process becomes complex with many steps and increased takt time
Solution Approach 1:
The invention extracts and eliminates the photolithography process steps (resist coating, exposure, development, etching, resist removal) by directly using laser beam irradiation to sublime and remove unnecessary portions of the thin film, achieving patterning in a single step without the complex multi-step conventional process
Solution Approach 2:
The invention replaces the mechanical and chemical photolithography system with a laser-based direct ablation system, where a laser beam directly sublimes the material without requiring chemical etchants or resist materials, thereby simplifying the manufacturing process
2Device complexity
If laser beam is used for patterning without cover glass, then process is simplified, but debris scatters and adheres to window glass causing quality variations
Solution Approach 1:
The invention introduces a cover glass as an intermediary component between the laser beam and the thin film substrate. This cover glass serves as a debris collection surface, preventing scattered sublimation debris from adhering to the window glass and causing display defects, while maintaining the simplicity of the laser patterning process
Solution Approach 2:
The invention converts the harmful effect of scattered sublimation debris into a beneficial outcome by directing the debris to adhere to the cover glass instead of the window glass or display panel, thereby transforming a potential quality issue into a manageable byproduct that can be easily removed
3Device complexity
If laser patterning is performed in air, then process is simple, but organic thin film properties deteriorate due to oxygen and moisture
Solution Approach 1:
The invention performs laser patterning within a vacuum chamber that maintains a controlled inert atmosphere, preventing oxygen and moisture from degrading the organic thin film during the laser irradiation process, thereby ensuring film stability and reliability
4Measurement precision
If window glass is placed close to substrate for laser transmission, then processing accuracy is maintained, but debris adheres to window glass requiring frequent maintenance
Solution Approach 1:
The invention places a cover glass between the window glass and the substrate, serving as a protective intermediary that collects sublimation debris. This allows the window glass to remain close to the substrate for accurate laser transmission while preventing debris accumulation on the window glass, thereby reducing maintenance frequency
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces processing time and costs, minimizes debris-related issues, and enhances the quality of organic EL display panels by maintaining accurate laser beam transmission and preventing debris reattachment, thus improving manufacturing efficiency and product quality.
Implementation Method 1
The laser emitter is disposed outside the chamber and emits the laser beam towards the thin film laminated substrate, through the first light transmissive plate and the second light transmissive plate, to irradiate and remove a portion of the thin film
Implementation Method 2
scanning a laser beam to remove an unnecessary portion of a thin film through sublimation has been proposed
Data Source
AI summary
A patterning device performs patterning in manufacture of a display panel in which thin films including an organic film are laminated above a substrate. The patterning device includes a chamber, light transmissive plates, and a laser emitter. The chamber has a light transmissive window including a first light transmissive plate through which a laser beam is transmitted and accommodates a thin film laminated substrate. A second light transmissive plate through which the laser beam is transmitted is in the chamber between the first light transmissive plate and the thin film laminated substrate at a position spaced away from the thin film laminated substrate. The laser emitter is outside the chamber and emits the laser beam towards the thin film laminated substrate, through the first light transmissive plate and the second light transmissive plate, to irradiate and remove a portion of the thin film.