Laser Output Window Gas Curtain for Dust Contamination Control

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Solution Overview

Problem

The laser output window of excimer lasers is prone to contamination due to dust generated during the discharge process, which circulates and causes damage, necessitating a dustproof structure to maintain operation and extend service life.

Innovation Solution

A dustproof structure incorporating a gas purifier, dust prevention pipeline, and cross-flow fan that creates a clean gas curtain around the laser output window, enhancing airflow to prevent dust particles from entering and contaminating the window.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If the laser output window is positioned close to the slit to reduce size, then the overall device size is reduced, but dust particles can easily enter the cavity and contaminate the window

Engineering Contradiction:

Improvedevice sizeVSAvoiddust contamination

Core Design Contradiction:

Volume of moving objectVSObject-affected harmful factors

Solution Approach 1:

A dust prevention pipeline is introduced as an intermediary component between the gas purifier and the cavity. This pipeline delivers purified working gas directly to the cavity, creating a protective gas curtain that prevents dust particles from contaminating the laser output window, thus resolving the contradiction between compact design and dust protection

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The invention uses pneumatic flow of purified working gas to create a protective curtain around the laser output window. By controlling the flow of gas through the dust prevention pipeline, a positive pressure environment is maintained in the cavity, preventing dust infiltration while keeping the window close to the slit

Inventive Principle:

Principle #29Pneumatics and hydraulics

2Use of energy by moving object

If working gas flows at small speed through the gap to reduce pressure difference, then energy consumption is reduced, but the gas flow becomes prone to blockage and dust accumulation

Engineering Contradiction:

Improveenergy consumptionVSAvoidflow stability

Core Design Contradiction:

Use of energy by moving objectVSReliability

Solution Approach 1:

The dust prevention pipeline ensures continuous flow of purified working gas to the cavity, maintaining uninterrupted protective gas curtain. This continuous action prevents dust accumulation and blockage while keeping the overall system energy-efficient by using only the portion of purified gas needed for protection

Inventive Principle:

Principle #20Continuity of useful action

3Object-affected harmful factors

If the cavity is completely sealed to prevent dust entry, then dust contamination is prevented, but the laser output window cannot be properly positioned relative to the slit

Engineering Contradiction:

Improvedust contaminationVSAvoidwindow positioning flexibility

Core Design Contradiction:

Object-affected harmful factorsVSAdaptability or versatility

Solution Approach 1:

Instead of completely sealing the cavity, the invention applies local protection by delivering purified gas specifically to the cavity through the dust prevention pipeline. This creates a localized dust-free zone around the laser output window while maintaining the necessary positioning relationship between the window and slit

Inventive Principle:

Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Effectively prevents dust particles from contaminating the laser output window, maintaining its integrity and extending its service life by strengthening the blowing of clean gas and reducing pressure gradients that affect beam quality.

Implementation Method 1

a gas purifier (20) configured to purify a working gas inside the discharge chamber (10)

Methodology Applied

Scientific EffectFiltration: Filter (physical)

Implementation Method 2

a dust prevention pipeline (11) including a gas inlet end connected to the gas purifier (20), a middle part passing through the cavity (12), and a gas outlet end connected to the fan (30)

Methodology Applied

Scientific EffectGas flow through pipeline:

Implementation Method 3

the fan (30) is configured to guide the working gas so as to increase a flow rate of clean gas passing through the cavity (12)

Methodology Applied

Scientific EffectFan-induced gas flow: Fan

Implementation Method 4

at least a portion of the working gas purified by the gas purifier flows through the dust prevention pipeline to the cavity and forms a dustproof gas curtain on an inner side of the laser output window (50)

Methodology Applied

Scientific EffectGas curtain formation:

Data Source

PatentUS20240235144A1Dustproof structure for laser output window of laser, and laser

Publication Date: 2024.07.11 RAINBOW SOURCE LASER RSLASER

AI summary

A dustproof structure for a laser output window of a laser includes a discharge chamber, a gas purifier, a dust prevention pipeline, and a fan. A cavity is provided between the laser output window and a slit. The dust prevention pipeline includes a gas inlet end connected to the gas purifier, a middle part passing through the cavity, and a gas outlet end connected to the fan. At least a portion of a working gas purified by the gas purifier flows through the dust prevention pipeline to the cavity. The fan guides the working gas so as to increase a flow rate of the gas passing through the cavity, thereby strengthening the blowing of the clean gas on the laser output window and effectively preventing dust particles in the working gas from approaching and contaminating the laser output window.