Laser Machining Window Protector Film for Particle Control
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Solution Overview
Problem
During the fabrication of display devices using laser processing, particles can be peeled off from the substrate and float or fall, leading to reduced efficiency of the laser processing due to particle accumulation on the chamber window, which blocks the laser beam and lowers its transmittance.
Innovation Solution
A laser machining apparatus is designed with a protector system that includes a flexible, laser-transmissive film (such as PET or PVC) positioned between the substrate carrier and the chamber window. This protector collects and removes particles, preventing them from reaching the chamber window and maintaining the laser beam's intensity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If laser processing is performed on substrate without protector, then processing can be carried out directly, but particles accumulate on chamber window reducing laser beam transmittance and processing efficiency
Solution Approach 1:
A transparent protector film is introduced as an intermediary component between the substrate and chamber window. This mediator collects particles during laser processing, preventing them from accumulating on the chamber window while allowing the laser beam to pass through effectively, thus maintaining both processing efficiency and laser beam transmittance
Solution Approach 2:
The protector film is designed as a disposable component that is replaced periodically. This inexpensive, short-lived element absorbs particle accumulation over time, protecting the expensive chamber window and maintaining processing efficiency without requiring complex cleaning or maintenance systems
2Reliability
If protector is installed between substrate and chamber window, then particles are collected and laser transmittance is maintained, but device structure becomes more complex
Solution Approach 1:
A thin, flexible transparent protector film is used instead of rigid protective structures. This film can be easily positioned between the substrate and chamber window using simple feed and take-up rolls, providing particle collection functionality without adding significant structural complexity to the apparatus
Solution Approach 2:
The protector film automatically performs particle collection during the laser processing operation itself, without requiring separate cleaning mechanisms or additional active components. The film passively accumulates particles as the laser processes the substrate, simplifying the overall system design
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus effectively collects and removes particles, maintaining high processing efficiency and reliability by preventing particle accumulation on the chamber window, thus ensuring consistent laser beam transmittance and quality of the laser processing.
Implementation Method 1
a laser irradiator which irradiates a laser onto the substrate carrier through the window
Implementation Method 2
a protector which connects the protector supplier with the protector retriever, wherein at least a portion of the protector is disposed between the substrate carrier and the window in the processing chamber
Data Source
AI summary
A laser machining apparatus includes, a processing chamber, a window disposed in a surface of the processing chamber, a substrate carrier disposed inside the processing chamber and facing the window, a laser irradiator which irradiates a laser onto the substrate carrier through the window, a protector supplier disposed on a side of the processing chamber, a protector retriever disposed on an opposite side of the processing chamber opposite to the side of the processing chamber, and a protector which connects the protector supplier with the protector retriever, where at least a portion of the protector is disposed between the substrate carrier and the window in the processing chamber.