Laser Writer Exposure Control During Variable Scan Velocity

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Solution Overview

Problem

Conventional laser writers only write onto the printing substrate during constant motion of the printing head, limiting printing efficiency, especially when high precision in nano-scale patterns is required.

Innovation Solution

Implementing a method to control a laser writer that moves the printing head with a non-constant velocity profile, adjusting laser beam intensity through a spatial light modulator (SLM) based on predetermined position triggers to accommodate acceleration and deceleration phases, ensuring precise pattern formation during these phases.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the printing head moves at constant velocity only, then writing precision is maintained, but printing efficiency is limited

Engineering Contradiction:

Improveprinting efficiencyVSAvoidwriting time during acceleration/deceleration

Core Design Contradiction:

ProductivityVSLoss of time

Solution Approach 1:

The system transitions from static constant-velocity writing to dynamic writing that adapts to varying printing head velocities. The control system dynamically adjusts laser parameters and SLM patterns based on real-time velocity feedback, enabling successful writing during acceleration and deceleration phases that were previously unusable.

Inventive Principle:

Principle #15Dynamics

Solution Approach 2:

The invention changes multiple parameters simultaneously: velocity profile (from constant to variable), laser intensity (modulated according to velocity), and SLM patterns (adjusted for non-constant motion). These coordinated parameter changes enable writing precision to be maintained across varying velocity conditions.

Inventive Principle:

Principle #35Parameter changes

2Productivity

If writing is attempted during acceleration and deceleration, then printing efficiency increases, but writing precision deteriorates

Engineering Contradiction:

Improveprinting speedVSAvoidpattern accuracy

Core Design Contradiction:

ProductivityVSManufacturing precision

Solution Approach 1:

The system implements closed-loop feedback by continuously monitoring printing head velocity and using this information to adjust laser writing parameters in real-time. This feedback mechanism allows the system to compensate for velocity variations and maintain pattern accuracy during dynamic motion phases.

Inventive Principle:

Principle #23Feedback

Solution Approach 2:

The control system performs preliminary calculations to determine optimal laser parameters and SLM patterns based on predicted velocity profiles. By pre-compensating for expected velocity changes during acceleration and deceleration, the system maintains writing precision before the actual writing occurs.

Inventive Principle:

Principle #10Preliminary action

3Manufacturing precision

If conventional constant velocity writing is used, then pattern accuracy is maintained, but useful writing time is reduced

Engineering Contradiction:

Improvenano-scale pattern precisionVSAvoidwriting duration

Core Design Contradiction:

Manufacturing precisionVSDuration of action of moving object

Solution Approach 1:

The invention eliminates idle time during acceleration and deceleration phases by maintaining continuous useful writing action throughout the entire printing head motion cycle. The laser writing process continues uninterrupted during velocity transitions, converting previously wasted time into productive writing time.

Inventive Principle:

Principle #20Continuity of useful action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enhances printing efficiency by allowing writing during acceleration and deceleration phases while maintaining precision in nano-scale patterns, thereby increasing the speed of pattern printing without compromising accuracy.

Implementation Method 1

A modulating optic such as a spatial light modulator (SLM), which can modify one or more laser beams that are directed towards a printing head

Methodology Applied

Scientific EffectLight modulation: Reflection

Implementation Method 2

directing one or more laser beams through a spatial light modulator (SLM), and towards the printing substrate

Methodology Applied

Scientific EffectLaser ablation: Laser Ablation

Implementation Method 3

the printing substrate may comprise a base substrate with a photoresist layer, and the printing substrate, having the pattern printed thereupon

Methodology Applied

Scientific EffectPhoto-oxidation: Photo-oxidation

Data Source

PatentEP4703793A1Laser writing with a non-constant exposure velocity

Publication Date: 2026.03.04 MYCRONIC

Figure 1A~1D
Figure 2A~2B
Figure 3A~3B

AI summary

There is disclosed herein a method for controlling a laser writer (100), comprising moving a printing head (102) in a scan direction (X) relative to a printing substrate (104), wherein the movement of the printing head (102) has a non-constant velocity profile, and directing one or more laser beams (106) through a spatial light modulator, SLM (108), and towards the printing substrate (104). The method comprises controlling the intensity of the one or more laser beams (106) directed through the SLM (108) according to one or more position triggers corresponding to predetermined positions of the printing head (102) relative to the printing substrate (104), such that the SLM (108) adopts an SLM array pattern corresponding to a printing pattern to be printed at a location on the printed substrate (104) when the printing head (102) is at said location on the printed substrate (104).