Lateral Bipolar Transistor Integrated ESD Device in Triple Well

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Solution Overview

Problem

Existing integrated circuit designs face challenges in reducing the size of electrostatic discharge (ESD) protection devices without compromising their protection capabilities, as they occupy a large percentage of the I/O area, making it difficult to increase the number of I/O pins while maintaining sufficient ESD protection.

Innovation Solution

The integration of a lateral bipolar transistor within a MOSFET, specifically using a triple well structure with isolated wells and diodes, reduces the trigger voltage, increases failure current, and decreases on-resistance, allowing for a smaller ESD protection device area while maintaining or exceeding protection capabilities.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If the size of ESD protection devices is reduced, then the number of I/O pins can be increased, but the protection capability deteriorates

Engineering Contradiction:
Improvenumber of I/O pinsVSAvoidESD protection capability
Core Design Contradiction:
Quantity of substanceVSReliability

Solution Approach 1:

The patent combines a lateral bipolar transistor with a MOSFET into an integrated structure, where the bipolar transistor's collector is connected to the MOSFET's drain and the bipolar's emitter connects to the I/O pad. This merging allows the compact combined structure to provide both ESD protection and I/O functionality, enabling increased I/O pin count while maintaining protection capability through the synergistic operation of the two transistor types.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent modifies key ESD device parameters by integrating the lateral bipolar transistor, which changes the trigger voltage, failure current, and on-resistance characteristics. The bipolar transistor's presence alters the electrical parameters to achieve lower trigger voltage and higher failure current, allowing reduced device area while maintaining or improving ESD protection performance.

Inventive Principle:
Principle #35Parameter changes

2Area of stationary object

If the area of ESD protection devices is reduced, then more I/O pins can be accommodated, but the failure current decreases

Engineering Contradiction:
ImproveESD device areaVSAvoidfailure current
Core Design Contradiction:
Area of stationary objectVSReliability

Solution Approach 1:

The lateral bipolar transistor is merged with the MOSFET such that the bipolar's collector connects to the MOSFET's drain region. This integration allows the bipolar transistor to contribute its high current capability to the ESD protection path, enabling the reduced-area device to maintain high failure current through the combined structure rather than relying solely on MOSFET dimensions.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The integration of the lateral bipolar transistor fundamentally changes the failure current parameter by introducing an additional current path through the bipolar device. The bipolar transistor's higher current density capability compensates for the reduced physical area, achieving increased failure current despite smaller device footprint.

Inventive Principle:
Principle #35Parameter changes

3Area of stationary object

If the area of ESD protection devices is reduced, then more I/O pins can be accommodated, but the on-resistance increases

Engineering Contradiction:
ImproveESD device areaVSAvoidon-resistance
Core Design Contradiction:
Area of stationary objectVSReliability

Solution Approach 1:

The lateral bipolar transistor is integrated with the MOSFET such that during normal operation, the bipolar device provides an additional parallel conduction path. This merging of conduction paths reduces the overall on-resistance of the ESD protection device, compensating for the reduced physical area and enabling lower on-resistance in the compact structure.

Inventive Principle:
Principle #5Merging (Combining)

4Area of moving object

If the size of ESD protection devices is reduced, then the I/O area increases, but the trigger voltage increases

Engineering Contradiction:
ImproveI/O areaVSAvoidtrigger voltage
Core Design Contradiction:
Area of moving objectVSReliability

Solution Approach 1:

The lateral bipolar transistor integration changes the trigger voltage parameter by introducing an alternative triggering mechanism through the bipolar device's base-emitter junction. The bipolar transistor can be triggered at lower voltages through substrate injection or direct base connection, enabling the reduced-size device to achieve lower trigger voltage compared to a scaled-down MOSFET alone.

Inventive Principle:
Principle #35Parameter changes

Data Source

PatentUS8803276B2Electrostatic discharge (ESD) device and method of fabricating
Publication Date: 2014.08.12 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US8803276B2 patent drawing
  • US8803276B2 patent drawing
  • US8803276B2 patent drawing

AI summary

A structure and method of fabricating electrostatic discharge (EDS) circuitry in an integrated circuit chip by integrating a lateral bipolar, either a p-n-p with a NMOSFET or a n-p-n with a PMOSFET within a triple well. The lateral bipolar preferably includes diodes at the I/O and/or the VDDs of the circuitry.