Lateral Bipolar Transistor with Under-Base Thermal Conduction

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Solution Overview

Problem

Bipolar transistors face challenges in thermal dissipation and stress management, which affect their performance and electron mobility, particularly in high-performance applications.

Innovation Solution

Incorporating a thermal conductive material, such as SiC, underneath the base region of a lateral SiGe heterojunction bipolar transistor to enhance thermal dissipation and connect thermally with the semiconductor substrate, while maintaining electrical isolation through a buried insulator layer and shallow trench isolation structures.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If a conventional bipolar transistor structure is used, then the device is simple to manufacture, but thermal dissipation is poor affecting performance

Engineering Contradiction:
Improvethermal dissipationVSAvoidstructure complexity
Core Design Contradiction:
TemperatureVSDevice complexity

Solution Approach 1:

A thermal conductor layer is introduced as an intermediary component between the base and the substrate. This thermal conductor acts as a mediator that facilitates heat transfer from the base to the substrate, resolving the thermal dissipation issue without requiring fundamental changes to the transistor structure. The thermal conductor layer with higher thermal conductivity than the substrate provides a dedicated thermal pathway while maintaining the overall device architecture.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The thermal management solution is implemented by adding a vertical dimension to the heat dissipation pathway. Instead of relying solely on lateral heat spreading in the substrate, the invention creates a vertical thermal conduction path through the thermal conductor layer underneath the base, enabling heat to be conducted downward to the substrate more efficiently.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Speed

If thermal dissipation is improved by adding thermal conductor, then electron mobility increases, but device complexity increases

Engineering Contradiction:
Improveelectron mobilityVSAvoidstructure complexity
Core Design Contradiction:
SpeedVSDevice complexity

Solution Approach 1:

The thermal conductor layer serves as an intermediary that indirectly benefits electron mobility by managing thermal conditions. Rather than directly affecting charge carrier transport, the thermal conductor improves electron mobility by maintaining lower operating temperatures through enhanced heat dissipation, thereby reducing thermal scattering of carriers.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Temperature

If thermal conductor material is placed under the base, then thermal dissipation improves, but manufacturing complexity increases

Engineering Contradiction:
Improvethermal dissipationVSAvoidmanufacturing complexity
Core Design Contradiction:
TemperatureVSEase of manufacture

Solution Approach 1:

The thermal conductor layer is integrated into the substrate preparation stage before transistor fabrication begins. By pre-forming the thermal conductor layer and establishing its thermal pathways ahead of time, the subsequent transistor manufacturing steps can proceed without additional complexity. This preliminary integration of the thermal management function into the substrate structure allows standard fabrication processes to be used.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Improves thermal dissipation and electron mobility, leading to enhanced performance metrics like Ft/Fmax, making the bipolar transistor suitable for high-performance applications.

Implementation Method 1

a thermal conductive material under the base and extending to an underlying semiconductor material

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentEP4243056A1Lateral bipolar transistor with thermal conductor underneath the base
Publication Date: 2023.09.13 GLOBALFOUNDRIES US INC
  • EP4243056A1 patent drawingFigure 1
  • EP4243056A1 patent drawingFigure 2A~2B
  • EP4243056A1 patent drawingFigure 2C~2D

AI summary

A lateral bipolar transistor (10) on an SOI substrate (12a, 12b, 12c) comprising: a base (16) formed within the semiconductor substrate (12c); a thermal conductive material (12d') under the base and extending to an underlying semiconductor material (15); an emitter (22) on a first side of the base (16); and a collector (24) on a second side of the base (16).