Lateral Charge Transfer in Semiconductor Imaging Layers

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Solution Overview

Problem

In imaging apparatuses using photoelectric conversion films, charge transfer efficiency is low due to defects and potential barriers, leading to reduced sensitivity and increased noise, especially for long-wavelength light.

Innovation Solution

The imaging apparatus employs a semiconductor layer with a substrate-based pixel circuit configuration, utilizing lateral charge transfer along interfaces with low defect levels, such as between the semiconductor and insulating layers, to efficiently move charge from the light receiving region to the charge discharging region, thereby reducing noise and improving sensitivity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If charge is transferred vertically to the upper electrode in a photoelectric conversion film, then charge can be collected, but transfer efficiency is low due to defects and potential barriers

Engineering Contradiction:
Improvecharge transfer efficiencyVSAvoiddefects and potential barriers
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent changes the charge transfer direction from vertical (perpendicular to substrate) to lateral (parallel to substrate surface). This dimensional change allows charge to move along the interface between semiconductor layer and insulating layer, avoiding defects and potential barriers present in the vertical path, thereby improving charge transfer efficiency especially for long-wavelength light

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Measurement precision

If photoelectric conversion film is used, then light detection is achieved, but sensitivity for long-wavelength light is reduced due to inefficient charge transfer

Engineering Contradiction:
ImprovesensitivityVSAvoidcharge transfer efficiency
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

By transitioning from vertical to lateral charge transfer along the semiconductor-insulating layer interface, the patent improves charge collection efficiency for long-wavelength light, thereby enhancing sensitivity without sacrificing measurement precision

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Object-generated harmful factors

If conventional photoelectric conversion structure is used, then imaging function is achieved, but noise and image lag increase due to residual charge

Engineering Contradiction:
ImprovenoiseVSAvoidcharge transfer efficiency
Core Design Contradiction:
Object-generated harmful factorsVSReliability

Solution Approach 1:

The lateral charge transfer mechanism along the interface enables more complete charge collection, reducing residual charge that would otherwise cause noise and image lag, thereby improving image quality

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The interface between the semiconductor layer and insulating layer serves as an intermediary pathway for charge transfer. This interface acts as a low-defect region that mediates charge movement from the light receiving region to the charge discharging region, reducing noise and improving signal quality

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enables high-speed and efficient charge transfer, reducing noise and image lag caused by residual charge, while maintaining sensitivity for long-wavelength light.

Implementation Method 1

a photoelectric conversion film is disposed on a semiconductor substrate

Methodology Applied
Scientific EffectPhotoelectric conversion: Photovoltaic Effect

Implementation Method 2

charge transfer efficiency is low due to defects and potential barriers, leading to reduced sensitivity and increased noise

Methodology Applied
Scientific EffectCharge transfer along interface: Conduction (electrical)

Data Source

PatentUS10483301B2Imaging apparatus and imaging system
Publication Date: 2019.11.19 CANON KK
  • US10483301B2 patent drawing
  • US10483301B2 patent drawing
  • US10483301B2 patent drawing

AI summary

An imaging apparatus according to the present invention includes a substrate including a plurality of pixel circuits arranged thereon and a semiconductor layer disposed on the substrate. Each of the plurality of pixel circuits includes an amplification transistor configured to output a signal based on charge generated in the semiconductor layer. The charge generated in the semiconductor layer is transferred in a first direction parallel to a surface of the substrate.