Lateral P-N Junction Black Phosphorus Thin Film

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Solution Overview

Problem

Black phosphorus-based transistors face limitations in charge mobility due to the formation of vertical hetero-junctions between p-type and n-type semiconductor materials, leading to decreased performance.

Innovation Solution

A lateral p-n junction black phosphorus thin film is created by modifying the surface of a black phosphorus thin film using a diazirine compound through light irradiation, converting p-type semiconductor regions into n-type semiconductor regions, thereby forming a homo-junction that maintains high charge mobility.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If vertical hetero-junctions are formed between p-type and n-type semiconductor materials to create black phosphorus-based transistors, then the transistor structure is established, but charge mobility decreases

Engineering Contradiction:
Improvetransistor structure formationVSAvoidcharge mobility
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent transitions from vertical hetero-junction architecture to lateral p-n junction architecture within the same plane. By forming p-type and n-type regions side-by-side in the black phosphorus thin film rather than stacking them vertically, the invention maintains material homogeneity while achieving junction functionality, thereby preserving charge mobility without sacrificing transistor manufacturability

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent uses the same black phosphorus material for both p-type and n-type regions, creating a homo-junction rather than a hetero-junction. This homogeneity eliminates the charge mobility degradation caused by material interfaces while maintaining the ability to form functional p-n junctions through lateral doping variations in the thin film structure

Inventive Principle:
Principle #33Homogeneity

2Reliability

If black phosphorus is used as a two-dimensional semiconductor material, then excellent charge mobility is achieved, but control of electrical conductivity is limited due to lack of band gap

Engineering Contradiction:
Improvecharge mobilityVSAvoidelectrical conductivity control
Core Design Contradiction:
ReliabilityVSEase of operation

Solution Approach 1:

The patent applies local quality by creating spatially distinct p-type and n-type doped regions within the black phosphorus thin film. Through selective chemical doping in different areas, the invention generates localized variations in carrier type and concentration, enabling electrical conductivity control at specific locations while preserving the overall high charge mobility of the undoped black phosphorus regions

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach effectively prevents the decrease in charge mobility associated with vertical junctions, enhancing electrical conductivity and mobility in semiconductor devices such as diodes, transistors, and solar cells.

Implementation Method 1

modifying the surface of a black phosphorus thin film using a diazirine compound through light irradiation

Methodology Applied
Scientific EffectPhotolysis: Photodissociation

Data Source

PatentEP3336058B1Lateral p-n junction black phosphorus thin film, and method of manufacturing the same
Publication Date: 2021.08.11 KOREA RES INST OF STANDARDS & SCI
  • EP3336058B1 patent drawingFigure 1A~2
  • EP3336058B1 patent drawingFigure 3(a)~3(d)
  • EP3336058B1 patent drawingFigure 4

AI summary

Provided are a lateral p-n junction black phosphorus thin film, and a method of manufacturing the same, and specifically, a lateral p-n junction black phosphorus thin film in which a p-type black phosphorus thin film having a p-type semiconductor property and a n-type black phosphorus thin film having a n-type semiconductor property form a lateral junction by modifying some regions on a surface of the black phosphorus thin film through light irradiation with a compound having a specific chemical structure, and a method of manufacturing the same.