Lateral Power Supply Antenna for Coaxial Waveguide
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Solution Overview
Problem
Existing plasma processing apparatuses face challenges in effectively supplying electromagnetic wave power to coaxial waveguides, particularly when a driving mechanism or other components obstruct the power supply path.
Innovation Solution
An electromagnetic-radiation power-supply mechanism is introduced, featuring a microwave power introduction port on the side of the coaxial waveguide, a power supply antenna with a ring-shaped reflection portion, and a wave retardation member to form a standing wave, enabling efficient power propagation through chain reactions of induced electric and magnetic fields.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If power is supplied from an extension of the coaxial waveguide, then the power supply structure is simple, but the power supply becomes ineffective when a driving mechanism or other member is disposed at the extension portion
Solution Approach 1:
The patent transitions from one-dimensional power supply (extension of coaxial waveguide) to three-dimensional power supply by providing power supply ports on the lateral surface of the coaxial waveguide. This allows power to be introduced from the side rather than from the end, bypassing obstructions in the extension path and enabling effective power delivery even when driving mechanisms or other components block the traditional power supply route.
2Adaptability or versatility
If a driving mechanism is disposed at the extension portion of the coaxial waveguide, then the waveguide can be positioned flexibly, but electromagnetic wave power cannot be supplied effectively
Solution Approach 1:
The patent introduces an intermediary power supply mechanism consisting of lateral power supply ports and corresponding power supply antennas on the coaxial waveguide. This intermediary system bypasses the obstruction caused by the driving mechanism, allowing electromagnetic wave power to be transmitted through the side of the waveguide rather than through the blocked extension path, thus maintaining both positioning flexibility and power supply effectiveness.
3Reliability
If power is supplied laterally to the coaxial waveguide, then power can be delivered even when the extension path is blocked, but the power supply structure becomes more complex
Solution Approach 1:
The patent implements multi-functionality by making the coaxial waveguide capable of both lateral power reception and end-power transmission. The waveguide structure is designed to accept electromagnetic wave power from lateral ports while maintaining its traditional function of transmitting power from the extension end, creating a universal power supply interface that adapts to different installation scenarios and obstruction conditions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution allows for effective electromagnetic wave power supply to the waveguide even when traditional power supply paths are obstructed, ensuring uniform and efficient power transmission for plasma processing.
Implementation Method 1
a first electromagnetic wave that is incident on the antenna body and a second electromagnetic wave reflected by the reflection portion form a standing wave
Implementation Method 2
the electromagnetic wave power propagates in the waveguide by chain reactions of an induced electric field and an induced magnetic field caused by the standing wave
Implementation Method 3
a second electromagnetic wave reflected by the reflection portion
Data Source
AI summary
An electromagnetic-radiation power-supply mechanism includes a microwave power introduction port provided on the side of the coaxial waveguide, a power line being connected to the microwave power introduction port; and a power supply antenna for radiating the electromagnetic wave power into the waveguide, the power supply antenna being connected to the power line. The power supply antenna includes an antenna body having a first pole connected to the power line and a second pole connected to an inner conductor of the waveguide; and a ring-shaped reflection portion extending from opposite sides of the antenna body.