Lateral Treating Solution Pump Heat Isolation
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional treating solution supply apparatuses for semiconductor wafers and other substrates suffer from heat transmission issues, causing alteration or deterioration of the treating solution due to the heating effect of electric motors, which can affect the integrity and effectiveness of the solution.
Innovation Solution
The treating solution supply apparatus is designed with a lateral arrangement of the liquid passage, chamber, and chamber driver, where the chamber driver producing heat is positioned away from the liquid passage and chamber, preventing heat transmission. This configuration includes a pump with a variable volume chamber, a diaphragm for solution handling, and nonelectrically operable switch valves to control solution flow, ensuring the solution remains unaffected by heat.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If the chamber driver is arranged above the liquid passage and chamber (conventional vertical arrangement), then the device occupies less horizontal space, but heat from the chamber driver transmits to the treating solution causing alteration and deterioration
Solution Approach 1:
The patent transitions from a vertical arrangement (chamber driver above liquid passage) to a lateral arrangement (chamber driver beside liquid passage). This dimensional reconfiguration maintains compact footprint while eliminating the heat transmission pathway from the chamber driver to the treating solution, as heat naturally rises vertically rather than laterally.
Solution Approach 2:
The chamber driver, which generates heat as a harmful byproduct, is extracted from its conventional position directly above the liquid passage and relocated to a lateral position. This separation removes the heat source from proximity to the treating solution, preventing thermal degradation while maintaining functional integration.
2Object-affected harmful factors
If the liquid passage, chamber, and chamber driver are arranged linearly laterally, then heat transmission to the treating solution is inhibited, but the device complexity increases compared to conventional arrangements
Solution Approach 1:
The patent merges the liquid passage, chamber, and chamber driver into a single linear lateral arrangement. This integration reduces the number of separate mounting structures and support elements needed, simplifying the overall device architecture while maintaining the heat-isolating lateral configuration.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design effectively inhibits heat transmission to the treating solution, preventing alteration and deterioration, while allowing efficient operation and minimizing the occupancy area, thus maintaining the solution's integrity and effectiveness.
Implementation Method 1
the heat of the chamber driver increases environmental temperature around the chamber driver, the liquid passage and chamber are never exposed to the heated air
Implementation Method 2
ambient air is heated by the heat of the motor which operates electrically. As the heated air goes up, the heat is transmitted to the intake piping, output piping, and chamber arranged above the motor
Implementation Method 3
The treating solution can be received and fed from/to the liquid passage by deformation of the diaphragm
Implementation Method 4
the pump has an air space between the chamber and the chamber driver for inhibiting heat of the chamber driver from transmitting to the chamber
Data Source
AI summary
A treating solution supply apparatus which supplies a treating solution for treating a substrate includes a liquid passage for allowing the treating solution to flow therethrough; and a pump including a chamber with a variable volume for receiving and feeding the treating solution from/to the liquid passage, and a chamber driver electrically driven to vary the volume of the chamber. The liquid passage, chamber, and chamber driver are arranged in the stated order laterally.