3D Lattice Gas Distribution Plate for Semiconductor Reaction Chambers
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Solution Overview
Problem
Conventional gas distribution plates in semiconductor manufacturing reaction chambers deliver precursor and reactant gases through shared through-holes, which may not allow for optimal separation and distribution of these gases.
Innovation Solution
A 3D lattice structure with a gyroid structure, featuring two isolated plenums with continuous interconnected channels, allows for separate delivery of precursor and reactant gases through distinct inlets, enhancing gas distribution and separation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional gas distribution plates with shared through-holes are used, then the structure is simple, but the gas distribution uniformity and separation control are insufficient
Solution Approach 1:
The gas distribution plate is segmented into multiple isolated plenums (first plenum, second plenum, third plenum) that are separated by interior walls. Each plenum receives different gases through dedicated inlets, allowing independent control and distribution of precursor and reactant gases. This segmentation enables precise gas distribution uniformity while maintaining a structured organizational framework.
Solution Approach 2:
The patent transitions from a conventional 2D gas distribution plate to a 3D lattice structure with multiple plenums distributed in three-dimensional space. The gyroid-based lattice architecture creates a complex 3D network of channels and plenums that provides superior gas distribution uniformity compared to flat 2D designs, while the periodic nature of the lattice maintains manufacturing feasibility.
2Reliability
If separate plenums are used for precursor and reactant delivery, then gas separation control is improved, but the device complexity increases
Solution Approach 1:
Multiple functional plenums (first plenum for precursor, second plenum for reactant, third plenum for additional gas) are merged into a single integrated gas distribution plate structure. The plenums are spatially separated by interior walls but structurally unified within the same component, achieving reliable gas separation control while avoiding the complexity of multiple separate assemblies.
Solution Approach 2:
The gas distribution plate is designed as a multi-functional universal component that simultaneously performs gas distribution, gas separation, and structural support functions. The lattice structure provides both the plenum chambers for gas storage and the structural framework for the entire system, reducing overall device complexity while maintaining reliable gas separation control.
3Reliability
If a continuous interior wall separates plenums, then gas isolation is improved, but the manufacturing complexity increases
Solution Approach 1:
The interior walls separating plenums are designed with specific geometric parameters derived from the gyroid lattice structure, including optimized thickness, curvature, and spatial arrangement. These parameter optimizations ensure effective gas isolation between plenums while maintaining manufacturability through additive manufacturing processes that can handle complex curved surfaces and thin-walled structures.
Solution Approach 2:
The continuous interior walls are implemented as part of a lattice structure that incorporates controlled porosity and open-cell architecture. This lattice design provides sufficient gas isolation while reducing material usage and simplifying manufacturing through additive processes. The porous lattice structure allows for easier fabrication compared to solid continuous walls while maintaining the necessary gas barrier functionality.
Data Source
AI summary
Various embodiments of the present technology may provide a 3D lattice structure having a first plenum having a first volume, and a second plenum, having a second volume, isolated from the first plenum. A continuous interior wall separates the first plenum from the second plenum and an outer surface partially encloses the first and second plenums.