Lattice-Shifted Photonic Crystal Waveguide for High-Speed Modulation

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Solution Overview

Problem

Current high-speed optical modulators face challenges in achieving a high on/off extinction ratio (ER) and low power consumption while maintaining a compact size, as they often require precise tuning, high carrier densities, and suffer from high optical loss and unit capacitance, limiting their speed and efficiency.

Innovation Solution

A photonic integrated circuit (PIC) with a lattice-shifted photonic crystal optical waveguide and a semiconductor-oxide-semiconductor diode, which uses slow light to enhance modulation efficiency, reducing the modulator length and optical loss while maintaining a wide bandwidth, by incorporating geometric features like periodic patterns or trenches to create a slow-light effect.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If carrier-injection phase modulation is used to achieve efficient modulation, then modulation efficiency is improved, but modulation speed is limited to around 1 Gb/s by minority-carrier diffusion

Engineering Contradiction:
Improvemodulation efficiencyVSAvoidmodulation speed
Core Design Contradiction:
ProductivityVSSpeed

Solution Approach 1:

The patent changes the fundamental parameter of carrier dynamics by using carrier-accumulation mode with a very thin oxide barrier layer (less than 10 nm) instead of traditional carrier-injection or carrier-depletion modes. This parameter change allows carriers to accumulate at the oxide interface under forward bias, enabling both high efficiency and high speed (greater than 10 Gb/s) modulation by eliminating minority-carrier diffusion limitations while maintaining strong phase modulation.

Inventive Principle:
Principle #35Parameter changes

2Speed

If carrier-depletion phase modulation is used to achieve fast modulation speed, then modulation speed is improved, but modulation efficiency deteriorates because it is hard to deplete a lot of charge

Engineering Contradiction:
Improvemodulation speedVSAvoidmodulation efficiency
Core Design Contradiction:
SpeedVSProductivity

Solution Approach 1:

The patent inverts the traditional carrier-depletion approach by using carrier-accumulation mode. Instead of depleting carriers to achieve fast modulation, the invention accumulates carriers at the oxide interface under forward bias. This inversion allows the diode to operate in a regime where both high speed and high efficiency are achieved simultaneously, as carriers accumulate rather than deplete, enabling strong phase modulation with fast response.

Inventive Principle:
Principle #13The other way round (Inversion)

3Length of moving object

If carrier-accumulation phase modulation is used to achieve high speed and short MZI length, then modulator length is reduced, but optical loss increases due to polycrystalline-silicon scattering and absorption

Engineering Contradiction:
Improvemodulator lengthVSAvoidoptical loss
Core Design Contradiction:
Length of moving objectVSLoss of energy

Solution Approach 1:

The patent changes the material parameter by using single-crystal silicon instead of polycrystalline silicon in the optical waveguide regions. This material parameter change dramatically reduces optical loss from polycrystalline-silicon scattering and absorption, allowing the short MZI (around 0.5 mm) achieved through carrier-accumulation modulation to have acceptable optical loss while maintaining high speed and compact size.

Inventive Principle:
Principle #35Parameter changes

4Use of energy by moving object

If carrier-accumulation phase modulation is used to achieve high carrier-mobility and low voltage operation, then voltage operation is reduced, but unit capacitance increases which limits modulation speed due to RC limits

Engineering Contradiction:
Improvevoltage operationVSAvoidmodulation speed
Core Design Contradiction:
Use of energy by moving objectVSSpeed

Solution Approach 1:

The patent changes the geometric parameter by using a very thin oxide barrier layer (less than 10 nm) in the semiconductor-oxide-semiconductor diode structure. This parameter change reduces the unit capacitance while maintaining the carrier-accumulation effect, thereby reducing the RC time constant and enabling modulation speeds greater than 10 Gb/s even with low voltage operation (less than 2V).

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution significantly increases modulation efficiency, allowing for shorter modulator lengths, reduced optical loss, and higher data rates, achieving an ER of greater than 7 dB at low voltage with reduced power consumption and capacitance, enabling data rates beyond 10 Gb/s.

Implementation Method 1

uses light slowed by a lattice-shifted photonic crystal optical waveguide to enhance a semiconductor-oxide-semiconductor diode

Methodology Applied
Scientific EffectSlow light:

Implementation Method 2

lattice-shifted photonic crystal optical waveguide

Methodology Applied
Scientific EffectPhotonic crystal: Photonic Crystal

Implementation Method 3

most of the reported high-speed optical modulators implemented using silicon are based on the free-carrier plasma dispersion effect, i.e., the index of refraction of silicon decreases as densities of electrons and holes (i.e., free carriers) increase

Methodology Applied
Scientific EffectFree-carrier plasma dispersion effect:

Implementation Method 4

the index of refraction is modulated, and the optical phase of propagating laser light is modulated

Methodology Applied
Scientific EffectPhase modulation: Phase Modulation

Implementation Method 5

the phase modulation can then be converted into optical intensity modulation (i.e., on/off switching) by building the phase-modulation optical waveguide into a ring-resonator modulator or a Mach-Zehnder interferometer (MZI)

Methodology Applied
Scientific EffectInterference: Interference

Data Source

PatentUS9535308B2Enhanced optical modulation using slow light
Publication Date: 2017.01.03 ORACLE INT CORP
  • US9535308B2 patent drawing
  • US9535308B2 patent drawing
  • US9535308B2 patent drawing

AI summary

A photonic integrated circuit (PIC) is described. This PIC includes a semiconductor-barrier layer-semiconductor diode in an optical waveguide that conveys an optical signal, where the barrier layer is an oxide or a high-k material. Moreover, semiconductor layers in the semiconductor-barrier layer-semiconductor diode may include geometric features (such as a periodic pattern of holes or trenches) that create a lattice-shifted photonic crystal optical waveguide having a group velocity of light that is lower than the group velocity of light in the first semiconductor layer and the second semiconductor layer without the geometric features. The optical waveguide is included in an optical modulator, such as a Mach-Zehnder interferometer (MZI).