Multi-Layer Object Image Description Registration

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Solution Overview

Problem

Registration between an image and a description of multi-layer objects is challenging due to element mismatch, size discrepancies, and manufacturing inaccuracies, which can lead to incorrect feature identification and measurement errors.

Innovation Solution

An apparatus and method that utilize a processor to match descriptions of individual layers with corresponding image parts, determining matching offsets, and combining these offsets for accurate registration, while allowing for masking of pixels to improve alignment and feature detection.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If traditional registration methods are used to align multi-layer objects, then the registration process becomes complex and time-consuming, but measurement accuracy and reliability deteriorate due to element mismatch and manufacturing inaccuracies

Engineering Contradiction:
Improvemeasurement accuracyVSAvoidregistration process complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent segments the multi-layer object description into individual layer descriptions, matching each layer separately with corresponding image parts. This segmentation allows for determining matching offsets for each layer independently, thereby improving measurement accuracy while managing the complexity through systematic processing of divided components.

Inventive Principle:
Principle #1Segmentation

2Measurement precision

If individual layer matching is performed for each layer of multi-layer objects, then measurement accuracy improves, but the processing time and computational resources increase

Engineering Contradiction:
Improvefeature identification accuracyVSAvoidregistration processing time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The patent performs preliminary actions by determining matching offsets for each layer in advance, before conducting the actual measurements. The offsets calculated during the matching phase are stored and applied during measurement operations, thereby improving feature identification accuracy while reducing processing time during the actual measurement task.

Inventive Principle:
Principle #10Preliminary action

3Manufacturing precision

If manufacturing inaccuracies and optical/mechanical issues are addressed through detailed layer-by-layer matching, then registration precision improves, but the ease of operation deteriorates due to increased complexity in setting up and managing the registration process

Engineering Contradiction:
Improveregistration precisionVSAvoidoperation simplicity
Core Design Contradiction:
Manufacturing precisionVSEase of operation

Solution Approach 1:

The patent implements self-service by enabling the system to automatically determine matching offsets through algorithmic processing of layer descriptions and image data. The automated offset determination and application reduces manual intervention, thereby improving registration precision while maintaining ease of operation through self-configuration capabilities.

Inventive Principle:
Principle #25Self-service

Data Source

PatentUS10902620B1Registration between an image of an object and a description
Publication Date: 2021.01.26 APPL MATERIALS ISRAEL LTD
  • US10902620B1 patent drawing
  • US10902620B1 patent drawing
  • US10902620B1 patent drawing

AI summary

An apparatus, method and non-transitory computer readable storage medium for registering between an image and a description of a multi-layer object, the apparatus comprising: a memory for storing an image of the object and at least part of the description, the part comprising a first description of a first layer and a second description of a second layer of the object; and a processor operatively connected to the memory for: matching the first description to a first part of the image, the first part informative of a part of the first layer, thereby determining a first matching offset; matching the second description to a second part of the image, the second part informative of a part of the second layer, thereby determining a second matching offset; and registering between the image and the description of the multi-layer object based on the at least on the first and second matching offsets.