Layered Body Positioning Using Moire Signals for Atomic-Scale Alignment
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Solution Overview
Problem
Existing nano imprint lithography methods face challenges in achieving high-accuracy alignment between objects with atomic-scale precision due to dependency on pixel length and observation magnification, leading to increased device size and cost, and difficulty in precise positioning.
Innovation Solution
A method involving layering a first and second object with non-overlapping array bodies, detecting luminescence or scattered light signals from these array bodies, calculating positional deviation, and adjusting the alignment using a positioning device to achieve atomic-scale accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If fluorescent imprinting alignment method is used, then positioning can be performed, but dependency on pixel length is large and high observation magnification is required, increasing device size and cost
Solution Approach 1:
The invention changes the detection parameter from direct imaging of alignment marks to detecting moire fringes generated by superimposing periodic structures. This parameter change enables positioning with reduced dependency on observation magnification and pixel length, thereby reducing device size and cost while maintaining high positioning accuracy
Solution Approach 2:
The invention introduces moire fringes as an intermediary phenomenon between the alignment marks and the detection system. By detecting the moire fringes generated by superimposing periodic structures rather than directly imaging the alignment marks, the system achieves higher positioning accuracy with reduced magnification requirements
2Measurement precision
If fluorescent imprinting alignment method is used, then positioning can be performed, but it is difficult to achieve atomic scale error accuracy
Solution Approach 1:
The invention changes the detection approach from direct alignment mark imaging to moire fringe detection. The periodic structures are designed with specific pitch relationships that generate moire fringes, enabling detection of sub-pixel displacements and achieving atomic scale positioning accuracy
Solution Approach 2:
The invention transforms the positioning measurement from direct spatial measurement to frequency domain measurement through moire fringe analysis. By analyzing the periodicity and phase of moire fringes, the system achieves precision beyond the limitations of direct pixel-based measurement
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise alignment between objects with atomic-scale accuracy without the need for high magnification, reducing dependency on detection pixel length and minimizing device size and cost.
Implementation Method 1
detecting, after the layering step, first light obtained from a first array body provided in the first object as a first signal, second light obtained from a second array body provided in the first object as a second signal, third light obtained from the second array body provided in the second object as a third signal, and fourth light obtained from the first array body provided in the second object as a fourth signal
Implementation Method 2
the first signal, the second signal, the third signal, and the fourth signal that are obtained from the first array body and the second array body may be scattered light of the first array body and the second array body
Data Source
AI summary
A positioning method includes a layering step of layering a first object and a second object, a detection step of detecting, after the layering step, a first signal obtained from a first array body of the first object, a second signal obtained from a second array body of the first object, a third signal obtained from the second array body of the second object, and a fourth signal obtained from the first array body of the second object, a calculating step of calculating positional deviation between the first object and the second object by respectively fitting the first to fourth signals, and an adjustment step of adjusting the positional deviation. The first array body has a first periodic structure having a period p1, and the second array body has a second periodic structure having a period p2. Neither the first array body nor the second array body of the first object overlaps the second array body or the first array body of the second object when the first object and the second object are layered.