Layered Electro-Optic Modulator for Compact Photonics Integration

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Solution Overview

Problem

Mach-Zehnder interferometer (MZI) modulators in photonics chips exhibit a weak electro-optic effect, resulting in a large form factor and high power consumption, which complicates their integration and operation in data communication and computation systems.

Innovation Solution

A structure for an electro-optic modulator is developed, featuring a waveguide core with an electro-optic modulator having an electrode, an active layer with a refractive index that changes with bias voltage, and a dielectric layer arranged laterally between the electrode and the active layer, optimizing phase matching and reducing footprint and power consumption.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If MZI modulators are used for optical switching, then optical signal routing is achieved, but the form factor becomes large and power consumption increases

Engineering Contradiction:
Improveoptical signal routing capabilityVSAvoidfootprint on photonics chip
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

The patent transitions from planar MZI modulator geometry to a vertical stacked configuration where the electro-optic modulator is positioned above the waveguide core in the z-dimension. This dimensional change allows the optical path to be folded vertically rather than horizontally, dramatically reducing the lateral footprint while maintaining the required optical interaction length and switching functionality.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The electro-optic modulator structure is nested vertically over the waveguide core, with the active layer positioned directly above the waveguide mode region. This nesting arrangement allows the modulator to occupy the vertical space above the waveguide rather than requiring lateral expansion, effectively packing the switching function into a compact volume above the optical path.

Inventive Principle:
Principle #7Nested doll (Nesting)

2Reliability

If MZI modulators are used for optical switching, then optical signal routing is achieved, but power consumption becomes large

Engineering Contradiction:
Improveoptical signal routing capabilityVSAvoidpower consumption
Core Design Contradiction:
ReliabilityVSUse of energy by moving object

Solution Approach 1:

The patent changes the geometric parameters of the electro-optic modulator structure, specifically reducing the interaction length between the RF signal and optical mode by transitioning to a vertical stacked configuration. This parameter change reduces the capacitance and resistive losses in the RF transmission path, thereby lowering the power consumption required to achieve the same switching effect while maintaining reliable optical signal routing.

Inventive Principle:
Principle #35Parameter changes

3Area of stationary object

If compact modulator structure is implemented, then footprint is reduced, but fabrication complexity increases

Engineering Contradiction:
Improvefootprint on photonics chipVSAvoidlayered structure complexity
Core Design Contradiction:
Area of stationary objectVSDevice complexity

Solution Approach 1:

The patent segments the photonic device into distinct functional layers: the waveguide core layer for optical propagation, the electro-optic modulator layer for signal modulation, and the dielectric layer for electrical isolation and RF signal routing. This segmentation allows each layer to be optimized independently and facilitates modular fabrication processes, reducing the overall fabrication complexity despite the vertical stacking arrangement.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The dielectric layer serves as an intermediary between the waveguide core and the electro-optic modulator, providing electrical isolation and serving as the transmission medium for the RF signal. This intermediary layer simplifies the fabrication by providing a standard photolithography and deposition process step that clearly defines the boundaries between functional regions, making the layered structure easier to manufacture despite its vertical complexity.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enables a compact, low-power electro-optic modulator with improved switching efficiency, enhancing the integration of optical and electronic components on photonics chips for efficient data routing and processing.

Implementation Method 1

The active layer is composed of a material having a refractive index that is a function of a bias voltage applied to the electrode and the active layer

Methodology Applied
Scientific EffectElectro-optic effect: Electro-Optic Effects

Data Source

PatentUS10684530B1Electro-optic modulators with layered arrangements
Publication Date: 2020.06.16 GLOBALFOUNDRIES US INC
  • US10684530B1 patent drawing
  • US10684530B1 patent drawing
  • US10684530B1 patent drawing

AI summary

Structures for an electro-optic modulator and methods of fabricating a structure for an electro-optic modulator. An electro-optic modulator is arranged over a portion of a waveguide core. The electro-optic modulator includes an electrode, an active layer arranged adjacent to the electrode, and a dielectric layer including a portion that has a lateral arrangement between the electrode and the active layer. The active layer is composed of a material having a refractive index that is a function of a bias voltage applied to the electrode and the active layer.