LBAW Reflector Stack for Suppressing Shear-Mode Spurious Passbands

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Solution Overview

Problem

Lateral acoustic coupling in bulk acoustic wave (BAW) thin-film devices, specifically laterally coupled BAW (LBAW) filters, face challenges with spurious passbands arising from the excitation of thickness-shear (TS2) wave modes, which are close to the desired passband, making it difficult to suppress unwanted responses effectively.

Innovation Solution

A reflector stack is designed to selectively pass shear waves at the frequency of the unwanted passband while reflecting both shear and longitudinal waves at the filter passband, using an asymmetric multilayer structure with varying layer thicknesses and acoustic impedances to achieve this frequency-dependent behavior, allowing for efficient suppression of the spurious TS2 mode.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Object-generated harmful factors

If a conventional acoustic reflector is used to suppress unwanted passbands, then the spurious TS2 mode can be suppressed, but the filter passband characteristics deteriorate due to loss of acoustic energy

Engineering Contradiction:
Improvespurious passband suppressionVSAvoidacoustic energy loss in filter passband
Core Design Contradiction:
Object-generated harmful factorsVSLoss of energy

Solution Approach 1:

The acoustic reflector is designed with non-uniform layer thicknesses where the first reflector layer has a thickness different from the quarter-wavelength thickness, while subsequent layers maintain or adjust their thicknesses to compensate. This local variation in thickness creates frequency-selective reflection characteristics that suppress the TS2 mode while preserving passband energy

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The reflector structure utilizes controlled deviations from the ideal quarter-wavelength thickness parameter. By intentionally setting the first layer thickness to a value different from the quarter-wavelength thickness and adjusting other layer thicknesses accordingly, the reflector achieves differentiated acoustic impedance profiles that selectively affect different frequency bands

Inventive Principle:
Principle #35Parameter changes

2Loss of energy

If the acoustic reflector is optimized to reflect both shear and longitudinal waves at the filter passband, then energy loss is reduced, but the ability to suppress the TS2 mode deteriorates

Engineering Contradiction:
Improveacoustic energy lossVSAvoidspurious passband suppression
Core Design Contradiction:
Loss of energyVSObject-generated harmful factors

Solution Approach 1:

The acoustic reflector is segmented into multiple layers with different thickness characteristics. The first layer serves a different function (creating impedance mismatch for TS2 suppression) compared to the subsequent layers (maintaining reflection for passband), allowing the reflector to perform both functions simultaneously through functional segmentation

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The reflector structure introduces asymmetry in layer thickness distribution, with the first layer having a distinctly different thickness from the quarter-wavelength value. This asymmetric configuration creates the necessary conditions for frequency-selective behavior, enabling differential treatment of the TS2 mode and the filter passband

Inventive Principle:
Principle #4Asymmetry

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach effectively suppresses the unwanted passband by at least 8 dB, improving the quality of the passband response and reducing manufacturing complexity by minimizing the number of layers required, making LBAW filters more suitable for commercial RF applications.

Implementation Method 1

the acoustic reflector structure is adapted to acoustically isolate the vibration layer from its surroundings at the first frequency band more efficiently than at the second frequency band

Methodology Applied
Scientific EffectAcoustic reflection: Reflection

Implementation Method 2

designed so that at the frequency of the unwanted passband, shear waves pass through the reflector

Methodology Applied
Scientific EffectAcoustic transmission: Refraction

Implementation Method 3

The piezoelectric thin-film layer and electrode layers that constitute the resonator transform the electric signal into acoustic vibration and vice versa

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Data Source

PatentEP2777153B1Laterally coupled bulk acoustic wave filter with improved passband characteristics
Publication Date: 2021.08.18 TEKNOLOGIAN TUTKIMUSKESKUS VTT OY
  • EP2777153B1 patent drawingFigure 1
  • EP2777153B1 patent drawingFigure 2~3
  • EP2777153B1 patent drawingFigure 4a~4b

AI summary

The invention relates to a laterally coupled bulk acoustic wave (LBAW) filter (70) comprising a vibration layer (73) for carrying bulk acoustic waves, electrode means (71, 72, 74) comprising a first electrode (71) coupled to the vibration layer (73) for exciting to the vibration layer (73) at least one longitudinal wave mode having a first frequency band and one shear wave mode having a second frequency band, and a second electrode (72) coupled to the vibration layer (73) for sensing the filter pass signal, the first and second electrodes (71, 72) being laterally arranged with respect to each other, and an acoustic reflector structure (75) in acoustic connection with the vibration layer(73). According to the invention, the reflector structure (75) is adapted to acoustically isolate the vibration layer (73) from its surroundings at the first frequency band more efficiently than at the second frequency band for suppressing the effect of the shear wave mode at the second frequency band from the filter pass signal. The invention helps to improve the quality of LBAW filter passbands.