LCD Array Substrate Spacer Formation via Merged Photoresist Layers
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Solution Overview
Problem
The manufacturing of LCD panels is costly due to the specific exposure steps required for the spacers in the array substrate, which increase production expenses.
Innovation Solution
A method for forming spacers in the array substrate of an LCD panel using a laminating structure with multiple photoresist layers and masks, where different transparencies in the masks allow for varying exposure intensities to create the spacer layers efficiently, reducing the need for additional exposure steps and costs.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a specific exposure step is used to make the spacers, then the spacer formation precision is improved, but the manufacturing cost increases
Solution Approach 1:
The patent combines the spacer formation process with the existing pixel electrode pattern formation process by using a single exposure step with a specifically designed mask. The mask includes both pixel electrode patterns and spacer patterns, allowing both structures to be formed simultaneously from one photoresist layer, thereby eliminating separate exposure steps and reducing manufacturing cost while maintaining precision
Solution Approach 2:
The exposure mask serves multiple functions by simultaneously defining both the pixel electrode patterns and the spacer patterns in a single exposure step. This multi-functional mask design allows the same exposure process to create multiple critical structures, reducing the total number of exposure steps required and lowering overall manufacturing complexity and cost
2Manufacturing precision
If multiple photoresist layers and masks are used for spacer formation, then the manufacturing complexity increases, but the manufacturing precision is improved
Solution Approach 1:
The patent merges the spacer formation process with the pixel electrode pattern formation process into a single exposure and development sequence. By incorporating spacer patterns directly into the exposure mask, both the pixel electrodes and spacers are formed from one photoresist layer in one exposure step, significantly reducing manufacturing process complexity while maintaining the precision needed for spacer formation
Solution Approach 2:
The patent applies preliminary action by pre-designing the exposure mask to include both pixel electrode and spacer patterns before the exposure process begins. This preliminary mask design ensures that both structures are correctly positioned and dimensioned from the start, eliminating the need for subsequent adjustment steps or additional photoresist layers, thereby reducing overall process complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach simplifies the manufacturing process and reduces costs by integrating spacer formation into existing layers, thereby lowering the overall production expenses of LCD panels.
Implementation Method 1
different transparencies in the masks allow for varying exposure intensities to create the spacer layers efficiently
Data Source
AI summary
A manufacturing method for a substrate for an LCD panel includes providing a substrate, and applying photoresist techniques to form a first wiring layer on the substrate and patterning the first wiring layer to form a first laminating layer. An insulating layer and a semiconductor film are also formed and the semiconductor film is patterned to form a second laminating layer. A second wiring layer is formed and patterned to create a third laminating layer, a passivation layer, and a conductive film, and the conductive film is patterned to form a pixel electrode and a fourth laminating layer. The first, second, third, and fourth laminating layers stack together to form the necessary spacer. A color filter substrate with a constant gap is held between the insulating layer and the first laminating layer, and between the passivation layer and the third laminating layer.