Liquid Crystal Display Transistor Metal Oxide Semiconductor Aperture Ratio

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Current liquid crystal display devices face challenges in achieving high aperture ratio, low power consumption, high resolution, and simplified manufacturing processes while maintaining reliability.

Innovation Solution

A liquid crystal display device design incorporating a transistor and capacitor with metal oxide semiconductor layers, including In—Zn oxide, and silicon oxynitride insulating layers, which allows for reduced resistance and increased aperture ratio, along with a simplified manufacturing method using CVD deposition and heat treatment.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Area of moving object

If conventional silicon semiconductors are used in transistors for liquid crystal display devices, then the manufacturing process is well-established, but the aperture ratio is limited and power consumption is high

Engineering Contradiction:
Improveaperture ratioVSAvoidpower consumption
Core Design Contradiction:
Area of moving objectVSUse of energy by moving object

Solution Approach 1:

The patent changes the material parameter from conventional silicon semiconductors to oxide semiconductors (In-Ga-Zn-O, In-Al-Zn-O), which fundamentally alters the electrical characteristics and enables higher aperture ratios while reducing power consumption through lower leakage currents

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs composite material structures combining oxide semiconductor layers with metal electrodes (Al, Mo, Cu) and insulating layers (silicon oxynitride, silicon oxide) to achieve both high aperture ratio and low power consumption through optimized material combinations

Inventive Principle:
Principle #40Composite materials

2Area of moving object

If the aperture ratio is increased to reduce power consumption, then fewer materials are needed, but the manufacturing precision and reliability may be compromised

Engineering Contradiction:
Improveaperture ratioVSAvoidmanufacturing precision
Core Design Contradiction:
Area of moving objectVSManufacturing precision

Solution Approach 1:

The patent applies different material compositions and structures to different regions: oxide semiconductor layers for channels, metal layers for electrodes, and specific insulating materials for dielectric layers, optimizing each region's properties while maintaining overall manufacturing precision

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent performs preliminary heat treatment (annealing at 500-700°C) and protective film formation before final device assembly to pre-stabilize the oxide semiconductor layers and prevent degradation during subsequent manufacturing steps

Inventive Principle:
Principle #10Preliminary action

3Device complexity

If a simplified manufacturing process is used to reduce complexity, then fewer steps are required, but the reliability and performance may deteriorate

Engineering Contradiction:
Improvemanufacturing process complexityVSAvoiddevice reliability
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

The patent merges the capacitor electrode formation with the transistor source/drain electrode formation into a single step, and combines multiple insulating layer depositions into sequential CVD processes, reducing total manufacturing steps while maintaining reliability through integrated structures

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent designs the oxide semiconductor layer to serve multiple functions: as the active channel layer, as part of the capacitor electrode structure, and as a template for subsequent processing steps, reducing the need for separate dedicated layers

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enables a liquid crystal display device with improved aperture ratio, reduced power consumption, high resolution, and enhanced reliability through efficient light transmission and simplified manufacturing.

Implementation Method 1

The first conductive layer and the second conductive layer are each configured to transmit visible light

Methodology Applied
Scientific EffectLight transmission: Light

Implementation Method 2

a simplified manufacturing method using CVD deposition

Methodology Applied
Scientific EffectChemical Vapour Deposition: Chemical Vapour Deposition

Implementation Method 3

heat treatment

Methodology Applied
Scientific EffectHeat treatment: Heat Treatment

Data Source

PatentUS11532650B2Display device, method for manufacturing the same, and electronic device
Publication Date: 2022.12.20 SEMICON ENERGY LAB CO LTD
  • US11532650B2 patent drawing
  • US11532650B2 patent drawing
  • US11532650B2 patent drawing

AI summary

A liquid crystal display device with a high aperture ratio is provided. A liquid crystal display device with low power consumption is provided. A display device includes a transistor and a capacitor. The transistor includes a first insulating layer, a first semiconductor layer in contact with the first insulating layer, a second insulating layer in contact with the first semiconductor layer, and a first conductive layer electrically connected to the first semiconductor layer via an opening portion provided in the second insulating layer. The capacitor includes a second conductive layer in contact with the first insulating layer, the second insulating layer in contact with the second conductive layer, and the first conductive layer in contact with the second insulating layer. The second conductive layer includes a composition similar to that of the first semiconductor layer. The first conductive layer and the second conductive layer are configured to transmit visible light.