LCOS Capacitor Structure Integration with DRAM
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Solution Overview
Problem
Existing liquid crystal on silicon (LCOS) technologies face challenges in manufacturing complexity, low yields, and bulkiness, making them unsuitable for larger displays and portable projectors due to the need for multiple chips and high costs.
Innovation Solution
A method for manufacturing an LCOS device with a semiconductor substrate, gate dielectric layer, word line, source/drain regions, interlayer dielectrics, plug structures, capacitor dielectric, and a mirror surface, integrated with a dynamic random access memory (DRAM) device, enabling a multi-purpose capacitor design and improved process integration with conventional technology.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional LCOS technology is used, then display functionality is achieved, but manufacturing complexity increases and yields decrease
Solution Approach 1:
The patent combines the capacitor structure with the pixel electrode structure by forming the bottom electrode as part of the pixel electrode assembly. This integration eliminates separate capacitor fabrication steps and reduces manufacturing complexity while maintaining display functionality and improving yields through simplified processing.
Solution Approach 2:
The bottom electrode structure serves dual functions: as part of the pixel electrode for light modulation and as the bottom electrode for the capacitor for voltage storage. This multi-functionality reduces the number of separate components and simplifies the manufacturing process while achieving both display and memory functions.
2Adaptability or versatility
If multiple LCOS chips are used, then display functionality is achieved, but device bulkiness increases
Solution Approach 1:
The patent merges the capacitor structure with the pixel electrode structure within a single chip, eliminating the need for separate capacitor chips or additional layers that would increase device bulkiness. This integration maintains full display functionality while reducing overall device volume.
3Reliability
If conventional LCOS manufacturing is used, then device functionality is achieved, but costs increase
Solution Approach 1:
The patent combines capacitor and pixel electrode fabrication into a single integrated process, reducing the number of manufacturing steps, materials required, and processing time. This integration lowers manufacturing costs while maintaining device functionality through the multi-functional bottom electrode structure.
Data Source
AI summary
A liquid crystal on silicon display device (LCOS) has a semiconductor substrate comprising a surface region and a gate dielectric layer overlying the surface region. The device also has a word line formed overlying the gate dielectric layer and a first source/drain region coupled to the word line. The device has a bottom electrode structure formed overlying an interlayer dielectric. A capacitor dielectric is formed overlying the bottom electrode. A top electrode structure is formed overlying the capacitor dielectric to form a capacitor structure including the bottom electrode structure, the capacitor dielectric, and the top electrode structure. The device has a mirror surface formed overlying the top electrode structure to form a pixel electrode structure and a liquid crystal material provided overlying the mirror surface. In an embodiment, the LCOS described above is in an integrated circuit chip that also includes a DRAM device.