LCOS Device Multiple Mirror Layers Reflectance
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Solution Overview
Problem
Conventional liquid crystal on silicon (LCOS) display devices have limited reflectance, typically around 80%, which can be improved for enhanced performance in display applications.
Innovation Solution
The fabrication method involves forming multiple mirror layers on a silicon substrate, with a first and second dielectric layer, and a first and second mirror layer, where the second mirror layer has a smaller grain size and thickness than the first, and the openings in these layers are strategically designed to enhance reflectivity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a single mirror layer is used in conventional LCOS devices, then the structure is simple and manufacturing is easier, but the reflectance is limited to around 80%
Solution Approach 1:
The single mirror layer is segmented into multiple mirror layers (first mirror layer and second mirror layer) with different grain sizes and thicknesses. This segmentation allows each layer to contribute differently to the overall reflectance, with the first mirror layer providing base reflection and the second mirror layer enhancing additional reflection, thereby increasing total reflectance from 80% to 85-90% while maintaining manageable structural complexity
Solution Approach 2:
Different regions of the mirror structure are given different properties - the first mirror layer has larger grain size and greater thickness for structural stability, while the second mirror layer has smaller grain size and smaller thickness for enhanced optical performance. This local differentiation optimizes both layers for their specific functions, achieving superior overall reflectance without uniform complexity throughout
2Reliability
If multiple mirror layers with different grain sizes and thicknesses are used, then reflectance increases to 85-90%, but manufacturing precision requirements increase
Solution Approach 1:
The patent systematically varies key parameters (grain size and thickness) between the first and second mirror layers to optimize reflectance. The first mirror layer uses larger grain size and greater thickness, while the second mirror layer uses smaller grain size and smaller thickness. These parameter changes are implemented through controlled deposition processes, achieving 85-90% reflectance while maintaining manufacturability through established thin-film fabrication techniques
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach increases the reflectance of the LCOS device to 85-90%, significantly improving its performance by optimizing the optical properties and reflection capabilities.
Implementation Method 1
The present invention provides a LCOS device having multiple (i.e., at least two) mirror layers. With the aid of the additional mirror layer(s), the novel LCOS device has an improved reflectance.
Data Source
AI summary
The present invention provides a LCOS device including a silicon substrate, a first dielectric layer, a first mirror layer, a second dielectric layer, and a second mirror layer. The first dielectric layer is disposed on the silicon substrate. The first mirror layer is disposed on the first dielectric layer. The second dielectric layer is disposed on the first mirror layer. The second mirror layer is disposed on the second dielectric layer.