LDMOS Drain Isolation Diode Circuit for Substrate Injection

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Solution Overview

Problem

In system-on-a-chip (SOC) applications with inductive loads, negative potential during switching leads to significant injection current into the substrate, disturbing adjacent circuits and affecting their operation.

Innovation Solution

The implementation of diode circuits, specifically Schottky diodes and PN junction diodes, coupled between the drain region and the isolation structure of laterally diffused metal oxide semiconductor (LDMOS) field effect transistors (FETs), which reduces or eliminates current injection into the substrate by maintaining the isolation structure potential even when the drain potential goes negative.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If the drain region is directly connected to the isolation structure, then the device structure is simple, but significant injection current flows into the substrate during switching, disturbing adjacent circuits

Engineering Contradiction:
Improvedevice structureVSAvoidinjection current
Core Design Contradiction:
Device complexityVSObject-generated harmful factors

Solution Approach 1:

A diode circuit is introduced as an intermediary component between the drain region and the isolation structure. This diode circuit controls the current flow path, allowing normal operation current to pass while blocking injection current from entering the substrate during switching events, thereby eliminating the harmful effect without complicating the overall device structure

Inventive Principle:
Principle #24Intermediary (Mediator)

2Adaptability or versatility

If the drain potential is allowed to go negative during switching, then the device can handle inductive loads, but this causes significant current injection into the substrate

Engineering Contradiction:
Improveinductive load handlingVSAvoidadjacent circuit operation
Core Design Contradiction:
Adaptability or versatilityVSReliability

Solution Approach 1:

The diode circuit serves as a protective intermediary that decouples the drain region from the isolation structure during negative potential events. When the drain goes negative due to inductive load switching, the diode blocks current flow to the isolation structure, preventing substrate injection and protecting adjacent circuits while still allowing the drain to experience the necessary negative potential for proper inductive load operation

Inventive Principle:
Principle #24Intermediary (Mediator)

3Ease of manufacture

If no diode circuit is used, then the manufacturing process is simple, but current injection disturbs adjacent circuit blocks

Engineering Contradiction:
Improvemanufacturing processVSAvoidcurrent injection disturbance
Core Design Contradiction:
Ease of manufactureVSObject-generated harmful factors

Solution Approach 1:

The diode circuit is integrated into the existing device structure using standard semiconductor fabrication techniques. The added components and processing steps are minimal and compatible with conventional manufacturing flows, allowing the harmful current injection effect to be eliminated without substantially increasing manufacturing complexity or cost

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution effectively reduces or eliminates current injection into the SOC substrate, thereby minimizing disruption to adjacent circuit blocks and improving the operational stability of SOC systems with inductive loads.

Implementation Method 1

The diode circuit includes a Schottky diode

Methodology Applied
Scientific EffectSchottky diode effect: Diode

Implementation Method 2

The diode circuit includes a PN junction diode

Methodology Applied
Scientific EffectPN junction effect: Diode

Data Source

PatentEP2680300B1Semiconductor device and driver circuit with drain and isolation structure interconnected through a diode circuit
Publication Date: 2021.05.26 NXP USA INC
  • EP2680300B1 patent drawingFigure 1
  • EP2680300B1 patent drawingFigure 2~3
  • EP2680300B1 patent drawingFigure 4~5

AI summary

Embodiments of semiconductor devices (200, 600, 700, 1100, 1300) and driver circuits (110) include a semiconductor substrate (210, 610, 710, 1110, 1310) having a first conductivity type, an isolation structure (including a sinker region (222, 622, 722, 1122, 1322, 1610, 1710) and a buried layer (220, 620, 720, 1120, 1320)), an active device within an area (230, 630, 730, 1130, 1330, 1520, 1620, 1720, 1820) of the substrate contained by the isolation structure, and a diode circuit (160). The buried layer is positioned below the top substrate surface (212, 612, 712, 1112, 1312), and has a second conductivity type. The sinker region extends between the top substrate surface and the buried layer, and has the second conductivity type. The active device includes a drain region (236, 636, 736, 1136, 1336) of the second conductivity type, and the diode circuit is connected between the isolation structure and the drain region. The diode circuit may include one or more Schottky diodes (346, 446, 546, 1245, 1445) and/or PN junction diodes (846, 946, 1046, 1246, 1446, 1447). In further embodiments, the diode circuit may include one or more resistive networks (410, 510, 910, 1010) in series and/or parallel with the Schottky and/or PN diode(s).