LDMOS Transistor P-Type Regions for Hole Extraction

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Solution Overview

Problem

LDMOS transistors face challenges in maintaining high on-breakdown voltage and negative input breakdown voltage, particularly as the gate width increases, due to limitations in existing structures that lead to reduced breakdown voltages and inefficient hole current paths.

Innovation Solution

The semiconductor device incorporates a p-type semiconductor region PISO provided over the n-type buried region and a p-type semiconductor region H1PW, which partially overlap and are positioned to reduce the resistance and length of hole current paths, enhancing breakdown voltages by creating additional paths for hole extraction.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Power

If the gate width is increased, then the current carrying capacity is improved, but the on-breakdown voltage is decreased

Engineering Contradiction:
Improvecurrent carrying capacityVSAvoidon-breakdown voltage
Core Design Contradiction:
PowerVSReliability

Solution Approach 1:

The invention divides the semiconductor substrate into multiple isolated regions, each containing an LDMOS transistor. This segmentation allows each transistor to maintain high on-breakdown voltage while the overall device achieves high current carrying capacity through parallel operation of multiple transistors.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention introduces a buried semiconductor region as an intermediary structure between the deep well and the drift region. This buried region provides additional hole extraction paths that prevent snap-back phenomenon and maintain high on-breakdown voltage even when gate width is increased for higher current capacity.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Ease of manufacture

If conventional LDMOS structures are used, then manufacturing is simplified, but negative input breakdown voltage is insufficient

Engineering Contradiction:
Improvestructure simplicityVSAvoidnegative input breakdown voltage
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The invention embeds a buried semiconductor region within the existing deep well structure, creating a nested configuration. This approach maintains manufacturing simplicity by using standard isolation techniques while adding the functional benefit of improved negative input breakdown voltage through the embedded region.

Inventive Principle:
Principle #7Nested doll (Nesting)

Data Source

PatentEP3211675B1Semiconductor device and manufacturing method of semiconductor device
Publication Date: 2020.12.16 RENESAS ELECTRONICS CORP
  • EP3211675B1 patent drawingFigure 1
  • EP3211675B1 patent drawingFigure 2
  • EP3211675B1 patent drawingFigure 3

AI summary

A first p type semiconductor region is provided between an n type drift region surrounding a drain region and an n type buried region, and a second p type semiconductor region is provided between the first p type semiconductor region and a p type well region surrounding a source region so as to overlap the first p type semiconductor region and the p type well region. Negative input breakdown voltage can be ensured by providing the first p type semiconductor region over the n type buried region. Further, potential difference between the source region and the first p type semiconductor region can be increased and the hole extraction can be performed quickly. Also, a path of hole current flowing via the second p type semiconductor region can be ensured by providing the second p type semiconductor region. Thus, the on-breakdown voltage can be improved.