Dual Lead Screw Lifting Control for Silicon Wafer Cleaning Stability

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Solution Overview

Problem

Existing single-arm wire rope suspension mechanisms for lifting silicon wafers are unstable, prone to vibration, and susceptible to breakage, which affects the quality of cleaning and can cause silicon wafers to crack.

Innovation Solution

A lifting control apparatus with a base and brackets on either side, driven by lead screws connected to a motor, allowing synchronized up and down movement to stabilize the lifting process, reducing vibration and improving durability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If a single-arm wire rope suspension mechanism is used for lifting, then the device complexity is reduced, but the stability and reliability of the lifting process deteriorates

Engineering Contradiction:
Improvestructure complexityVSAvoidlifting stability
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

The lifting mechanism is segmented into two independent arms with separate wire ropes, each controlled by its own winch. This segmentation allows independent control and stabilization of each arm, preventing the instability and shaking problems associated with single-arm suspension while maintaining manageable structural complexity through modular design.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The dual-arm structure acts as a counterbalancing system where the two arms support the basket from opposite sides, distributing the load and providing mutual stabilization. This counterbalancing effect reduces the shaking and vibration inherent in single-arm systems, significantly improving lifting stability and reliability.

Inventive Principle:
Principle #8Anti-weight (Counterweight)

2Ease of manufacture

If wire ropes are used for suspension, then the ease of manufacture is improved, but the durability and resistance to wear deteriorates

Engineering Contradiction:
Improvemanufacturing easeVSAvoidservice life
Core Design Contradiction:
Ease of manufactureVSDuration of action of stationary object

Solution Approach 1:

The system incorporates protective measures such as wire rope protectors and guide rollers at critical contact points. These protective elements cushion the wire ropes from abrasion and mechanical damage during operation, significantly extending their service life while maintaining the ease of manufacture advantage of using standard wire rope components.

Inventive Principle:
Principle #11Beforehand cushioning (Prior cushioning)

Solution Approach 2:

Guide rollers and protective sleeves are introduced as intermediary elements between the wire ropes and contact surfaces. These intermediaries reduce direct friction and wear on the wire ropes, preventing premature breakage while allowing the system to retain the manufacturing simplicity of wire rope-based suspension.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Ease of manufacture

If wire ropes are used for suspension, then the ease of manufacture is improved, but the resistance to vibration and shaking deteriorates

Engineering Contradiction:
Improvemanufacturing easeVSAvoidvibration and shaking
Core Design Contradiction:
Ease of manufactureVSObject-affected harmful factors

Solution Approach 1:

The system employs dynamic control through independently operable winches for each arm, allowing real-time adjustment of tension and position to counteract vibrations and shaking. This dynamic control capability reduces the harmful effects of vibration on the silicon wafers while maintaining the manufacturing simplicity of the wire rope-based structure.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The dual-arm system with synchronized winch control creates counterbalancing vibrations that cancel out harmful oscillations. By coordinating the motion of both arms, the system reduces net vibration and shaking, protecting the silicon wafers from damage while retaining the ease of manufacture benefits.

Inventive Principle:
Principle #18Mechanical vibration

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The apparatus provides stable and synchronized movement of the base and basket, enhancing the quality of silicon wafer cleaning and extending the service life by preventing shaking and breakage.

Implementation Method 1

the driver is provided with a lead screw; the lead screw is connected with the bracket on a same side; the lead screw on one side is driven to rotate the lead screw on another side synchronously, and the lead screws on both sides are driven to move the brackets on both sides and the base between the brackets up and down together

Methodology Applied
Scientific EffectLead screw mechanism: Screw

Data Source

PatentUS20250018447A1Lifting control apparatuses and cleaners including the same
Publication Date: 2025.01.16 TIANJIN ZHONGHUAN SEMICON CO LTD
  • US20250018447A1 patent drawing
  • US20250018447A1 patent drawing
  • US20250018447A1 patent drawing

AI summary

A lifting control apparatus may include: a base for holding a basket containing silicon wafers; brackets provided on an outside of both ends of the base; and a driver for driving the brackets to move up and down. The driver is provided with a lead screw. The lead screw is connected with the bracket on a same side. The lead screw on one side is driven to rotate the lead screw on another side synchronously, and the lead screws on both sides are driven to move the brackets on both sides and the base between the brackets up and down together. Or the lead screws on both sides are driven to rotate synchronously, so that the lead screws on both sides drive the base between the brackets through the correspondingly brackets to move up and down together.