Semiconductor Leadframe Diffusion Barrier for Ion Blocking

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Solution Overview

Problem

In semiconductor packages, metal ions from the leadframe diffuse through the isolating adhesion layer, affecting the performance of electrically isolated chips over time, leading to undesirable performance degradation.

Innovation Solution

A diffusion barrier is deposited on the leadframe's die pad to prevent the migration of metal ions from the leadframe to the chips, enhancing adhesion and maintaining electrical integrity by using materials like tantalum, tantalum nitride, or titanium tungsten, which are applied as a thin film without altering the package design.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If an isolating adhesion layer is used to electrically isolate the chip from the leadframe, then electrical isolation is achieved, but metal ions diffuse through the layer over time causing performance degradation

Engineering Contradiction:
Improveelectrical isolationVSAvoidmetal ion diffusion
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

A diffusion barrier layer is introduced as an intermediary between the leadframe and the isolating adhesion layer. This barrier layer specifically blocks metal ion diffusion while allowing the isolating adhesion layer to maintain its electrical isolation function. The barrier layer acts as a mediator that prevents harmful metal ions from reaching the chip without interfering with the electrical isolation purpose of the adhesion layer.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The interface between the leadframe and chip is segmented into multiple functional layers: the leadframe surface, the diffusion barrier layer, and the isolating adhesion layer. This segmentation allows each layer to perform its specific function - the diffusion barrier layer handles metal ion blocking while the adhesion layer handles electrical isolation, resolving the contradiction by separating these two protective functions into distinct layers.

Inventive Principle:
Principle #1Segmentation

2Object-affected harmful factors

If a diffusion barrier is deposited on the die pad, then metal ion diffusion is prevented, but the device structure becomes more complex

Engineering Contradiction:
Improvemetal ion diffusionVSAvoiddevice structure
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The diffusion barrier is implemented as a thin film deposited on the die pad surface rather than a bulky structural component. This thin film approach provides effective metal ion diffusion prevention while minimizing the increase in device complexity and overall package size. The thin film nature of the barrier allows it to be integrated into existing package designs with minimal structural modification.

Inventive Principle:
Principle #30Flexible shells and thin films

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The diffusion barrier effectively minimizes metal ion diffusion, improving adhesion, preventing oxidation, and maintaining the electrical properties of the semiconductor package, thus enhancing the performance and reliability of the semiconductor device.

Implementation Method 1

a diffusion barrier deposited on at least a portion of the die pad

Methodology Applied
Scientific EffectDiffusion barrier: Diffusion Barrier

Implementation Method 2

preventing oxidation

Methodology Applied
Scientific EffectOxidation prevention: Oxidation

Data Source

PatentUS7675146B2Semiconductor device with leadframe including a diffusion barrier
Publication Date: 2010.03.09 INFINEON TECHNOLOGIES AG
  • US7675146B2 patent drawing
  • US7675146B2 patent drawing
  • US7675146B2 patent drawing

AI summary

A semiconductor device includes a leadframe having a first face and an opposing second face, a portion of the first face defining a die pad, a diffusion barrier deposited on at least a portion of the die pad, and at least one chip coupled to the diffusion barrier.