Leadframe Half-Etch Layout to Reduce Singulation Burrs
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Solution Overview
Problem
The reduction in pin pitch of semiconductor packages leads to issues during singulation, causing short circuits and increased capacitive coupling due to burrs created by the sawing process.
Innovation Solution
A leadframe matrix with partially etched leads along peripheral sides, where the partially etched portions are connected to interconnecting leadframe portions, reducing distortion and burrs during singulation by half-etching specific areas along the sawing line.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If pin pitch is reduced to increase leadframe density, then productivity and package size are improved, but manufacturing precision deteriorates due to burrs and distortion during singulation causing short circuits
Solution Approach 1:
The patent applies preliminary action by performing partial etching of the leadframe peripheral sides before the singulation process. This pre-treatment modifies the material structure at the cutting line, making it more resistant to burr formation and distortion during subsequent sawing. The etched regions create a controlled weakness that directs the cut cleanly through the material without generating harmful burrs that would cause short circuits between adjacent leadframes.
Solution Approach 2:
The patent implements local quality by applying partial etching only to specific regions along the peripheral sides of the leadframe, rather than uniformly treating the entire structure. The etching is concentrated at the cutting lines where singulation will occur, creating localized modifications that prevent burr formation exactly where needed. This selective treatment maintains the structural integrity of non-etching regions while solving the singulation precision problem.
2Volume of moving object
If pin width and pin spacing are reduced to achieve smaller packages, then device miniaturization is improved, but reliability deteriorates due to increased capacitive coupling and short circuit risks
Solution Approach 1:
The partial etching process is performed in advance of singulation to create clean cutting surfaces that prevent burr formation. This preliminary modification ensures that when leadframes are separated, there are no protruding burrs that could bridge the small gaps between closely spaced pins, thereby maintaining electrical isolation and reliability even in miniaturized packages with reduced pin spacing.
Solution Approach 2:
The patent converts the potentially harmful effect of close pin spacing (which increases capacitive coupling and short circuit risk) into a benefit by using partial etching to create controlled separation surfaces. The etching process intentionally modifies the material at critical locations to ensure clean separation, transforming the risk of burr-induced short circuits into a controlled process that actually enhances reliability in high-density configurations.
Data Source
AI summary
A leadframe matrix for mounting and packaging semiconductor dice includes a plurality of leadframes each including leads arranged along peripheral sides thereof. An interconnecting leadframe portion connects a first peripheral side of a first one of the plurality of leadframes to a second peripheral side of a second one of the plurality of leadframes. The leads along the first peripheral side include partially etched portions. The partially etched portions of the leads are at least partially contiguous with and connected to the interconnecting leadframe portions.


