Leak Detection Sensor in Process Fluid Dry Chamber
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Solution Overview
Problem
Existing process fluid systems lack effective early detection of leaks, which can lead to failures and increased costs, especially in industries like semiconductors where leaks are not directly visible.
Innovation Solution
A device with a body and a functional unit that includes a sensor placed in a drying room to detect process fluid entry, ensuring early and safe leakage detection by separating the fluid section from the drying room through a sealing area.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If visual leak detection methods are used, then leak detection is simple, but leaks are not detectable at points where the product is not directly visible
Solution Approach 1:
The patent introduces an intermediary sensor system that detects process fluid in the dry space indirectly through electrical conductivity changes. Instead of direct visual inspection, the sensor acts as a mediator that converts the presence of conductive process fluid into an electrical signal, enabling detection of leaks that are not directly visible while maintaining system simplicity
Solution Approach 2:
The patent replaces visual/mechanical leak detection with an electrical sensing system. The sensor uses electrical conductivity measurements to detect the presence of process fluid, substituting the mechanical/visual inspection method with an electrical field-based detection method that can sense leaks remotely and indirectly
2Reliability
If external sensors are used for leak detection, then leak detection is achieved, but costs and required installation space increase
Solution Approach 1:
The patent merges the leak detection function with the existing device structure by integrating the sensor into the dry space of the same housing. The sensor is combined with the functional unit and mounted on the inner wall of the dry space, eliminating the need for separate external sensor installations and reducing overall system complexity and space requirements
Solution Approach 2:
The device structure serves multiple functions: it contains both the fluid-carrying section and the dry space with integrated sensor detection. The housing acts as both the process fluid container and the sensor mounting structure, demonstrating multi-functionality that reduces the need for additional dedicated leak detection components
3Loss of time
If the sensor is placed close to the sealing area, then early leak detection is achieved, but the sensor requires secure fixation near the fluid-carrying area
Solution Approach 1:
The sensor mounts itself to the inner wall of the dry space using its own adhesive properties without requiring external fixation mechanisms. The sensor's adhesive backing serves the dual purpose of mounting and electrical connection, enabling the sensor to secure itself in the optimal position for early leak detection while simplifying the overall fixation system
4Ease of manufacture
If adhesive fixation of the sensor is used, then simple sensor mounting is achieved, but adhesive compatibility certification becomes complex
Solution Approach 1:
The patent replaces adhesive fixation with a mechanical mounting system using a sensor mount with clamping arms and a tightening element. This mechanical system eliminates the need for adhesives, simplifying certification by removing chemical compatibility requirements while maintaining easy installation through the mechanical clamping mechanism
Data Source
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AI summary
A process fluid technology device (2) is provided. This comprises: a body (100) with at least one fluid connection (102, 104) which leads into a fluid channel (106) inside the body (100), wherein the body (100) comprises at least one further opening (110) associated with a functional unit (200) which leads into the fluid channel (106); and the functional unit (200) detachably arranged on the body (100), which closes the further opening (110) of the body (100) along a sealing area (300), wherein the sealing area (300) separates a fluid-carrying section (302) of the device (2) from a dry chamber (310) of the device (2), wherein at least one sensor (400) arranged in the dry chamber (310) is configured to generate a sensor signal (S_400) which indicates an entry of process fluid into the dry chamber (310).