LED Calibration Method for Plasma Spectroscopy Deviations
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Solution Overview
Problem
Existing plasma processing apparatuses face deviations in detection results due to installation components, leading to inaccuracies in optical emission spectroscopy data interpretation, which decreases productivity.
Innovation Solution
A calibration method using an LED light source with adjustable output is employed to acquire reference and target data, allowing for the calculation of a calibration formula to correct deviations caused by installation components, ensuring consistent detection values across different chambers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Extent of automation
If optical emission spectroscopy is used to monitor plasma processing, then process monitoring capability is improved, but detection accuracy deteriorates due to deviations caused by installation components
Solution Approach 1:
The patent introduces a light source as an intermediary object to establish a reference measurement path. This light source emits light through the same optical components (lenses, mirrors, windows) that transmit plasma emission, allowing the system to measure and compensate for deviations introduced by these components. The reference light path acts as a mediator between the plasma emission and the detector, enabling correction of installation-induced variations.
Solution Approach 2:
The patent changes the parameter being measured by introducing a known light source with specific spectral characteristics. By comparing the reference light measurements with actual plasma emission measurements, the system identifies and corrects parameter deviations caused by installation components. This involves measuring intensity, wavelength, or other optical parameters of the reference light to establish correction factors.
2Measurement precision
If calibration is performed for each chamber individually, then detection accuracy is improved, but productivity deteriorates due to time-consuming calibration processes
Solution Approach 1:
The patent creates a universal calibration method using a light source that can be applied across multiple chambers. The reference light measurements establish a calibration approach that can be transferred or compared between different plasma processing chambers, reducing the need for completely separate calibration procedures for each chamber while maintaining detection accuracy.
Solution Approach 2:
The patent performs preliminary calibration measurements using the light source before actual plasma processing. By establishing reference measurements in advance and creating calibration formulas beforehand, the system reduces the time required during actual processing operations. The calibration data is prepared and stored for subsequent use, minimizing real-time calibration overhead.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method reduces errors in optical emission spectroscopy data, enhancing data interpretation accuracy and productivity by standardizing detection values across multiple plasma processing apparatuses.
Implementation Method 1
placing an LED light source having a given wavelength range inside a reference apparatus
Implementation Method 2
acquiring first data as an emission intensity of light at a wavelength, a light amount of the light being adjusted in stages by changing the light amount output from the LED light source
Data Source
AI summary
A calibration method includes placing an LED light source having a given wavelength range inside a reference apparatus; acquiring first data as an emission intensity of light at a wavelength, a light amount of the light being adjusted in stages by changing the light amount output from the LED light source; storing the first data in a memory; placing the LED light source in a calibration target apparatus; acquiring second data as an emission intensity of light at a wavelength, a light amount of the light being adjusted in the stages by changing the light amount output from the LED light source; and calculating a calibration formula based on the first data stored in the memory and the second data.