LED Edge Exposure Apparatus Retrofit for Semiconductor Manufacturing
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Solution Overview
Problem
Existing edge exposure systems using mercury vapor lamps are costly, hazardous, and inefficient, requiring a more affordable and safer alternative for semiconductor manufacturing processes.
Innovation Solution
The system replaces mercury vapor lamps with LED light sources, utilizing a software emulator to translate mechanical commands from the host controller into non-mechanical commands for the LED module, allowing seamless integration and operation within existing tools.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If mercury vapor lamps are used for edge exposure, then sufficient exposure energy is achieved, but operational hazards and cost increase
Solution Approach 1:
The patent replaces the mechanical/thermal mercury vapor lamp system with an LED-based optical system. The LED module emits light directly without requiring mercury vaporization, eliminating the harmful factors associated with mercury lamps while maintaining sufficient exposure energy through optimized LED wavelength selection and intensity control.
Solution Approach 2:
The patent changes the fundamental parameters of the light source from mercury vapor emission spectrum to LED emission spectrum. By selecting specific LED wavelengths that match the photoresist sensitivity curve and adjusting the LED drive current to achieve appropriate exposure intensity, the system maintains reliability while eliminating operational hazards.
2Illumination intensity
If mercury vapor lamps are used for edge exposure, then required light output is achieved, but operational cost increases
Solution Approach 1:
The patent substitutes the energy-inefficient mercury vapor lamp system with an LED system that converts electrical energy to light more efficiently. LEDs have higher luminous efficacy and lower operational costs, while the patent ensures sufficient light output through optimized optical design and LED array configuration.
Solution Approach 2:
The patent optimizes the LED operating parameters including drive current, pulse width modulation duty cycle, and wavelength selection to achieve the required illumination intensity at lower operational cost compared to mercury vapor lamps.
3Ease of manufacture
If LED light source is implemented, then cost and safety are improved, but compatibility with existing control systems deteriorates
Solution Approach 1:
The patent introduces an intermediary control layer between the existing host controller and the LED module. This intermediary translates the original control signals intended for mercury vapor lamps into appropriate control signals for the LED driver, maintaining compatibility with existing control systems while enabling LED operation.
Solution Approach 2:
The patent designs the LED module and control interface to be universally compatible with existing edge exposure tool architectures. By maintaining the same physical interface, mounting configuration, and control protocol structure, the LED module can replace mercury vapor lamps in existing tools without requiring system-wide modifications.
4Loss of energy
If LED module is used instead of mercury vapor lamp, then energy efficiency is improved, but command translation complexity increases
Solution Approach 1:
The patent employs an intermediary translation layer that converts high-level host controller commands into LED-specific control signals. This translation layer handles the complexity of command mapping, pulse modulation, and intensity control, while presenting a simple interface to both the host controller and the LED module, thereby managing complexity without compromising energy efficiency.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution provides a cost-effective, safer, and more efficient edge exposure process by using LED light sources that emit precise wavelengths of light, reducing energy consumption and operational hazards while maintaining compatibility with existing infrastructure.
Implementation Method 1
replacing a mercury vapor lamp light source with a light emitting diode (LED) light source
Implementation Method 2
exposing an edge portion of the photosensitive layer to radiation generated by the low energy retrofit edge exposure unit
Data Source
AI summary
An LED wafer edge exposure apparatus may be used to emit light on a workpiece (such as a silicon wafer with a photoresist layer) during a manufacturing process (such as an edge exposure process or photolithography process) of semiconductors (such as computer chips). The LED wafer edge exposure apparatus may be created by exchanging an existing light source, e.g., a mercury vapor lamp, with a replacement light source, e.g., an LED light source in a high energy wafer edge exposure apparatus.