GaN LED P-Type Layer Defect Management

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Solution Overview

Problem

The internal quantum efficiency of GaN-based LEDs is limited by high hole concentration in the P layer, which is difficult to achieve due to doping efficiency issues, and external quantum efficiency improvements through thinning the P layer lead to increased V-type defect density, causing electric leakage and poor anti-static properties.

Innovation Solution

A method for fabricating a light emitting diode with a P-type layer comprising a Mg-doped GaN material, having a controlled Mg impurity concentration and thickness, and a reduced surface density of V-type defects, achieved through specific growth conditions such as a high Mg/Ga mole ratio and low growth rate, along with an electronic blocking layer with optimized defect structure.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of energy

If the P layer is thinned to improve external quantum efficiency, then light emission efficiency is improved, but V-type defect density increases causing electric leakage and poor anti-static properties

Engineering Contradiction:
Improveexternal quantum efficiencyVSAvoidelectric leakage and anti-static properties
Core Design Contradiction:
Loss of energyVSReliability

Solution Approach 1:

The patent applies parameter changes by precisely controlling the P layer thickness within 50-250 Å and managing V-type defect density between 1×10^6 to 1×10^8 cm^-2. This optimization balances light emission efficiency with electrical performance, resolving the contradiction between external quantum efficiency and device reliability.

Inventive Principle:
Principle #35Parameter changes

2Loss of energy

If Mg doping concentration is increased to improve hole concentration in the P layer, then internal quantum efficiency is improved, but doping efficiency and ionization efficiency of Mg become limiting factors

Engineering Contradiction:
Improveinternal quantum efficiencyVSAvoiddoping efficiency and ionization efficiency
Core Design Contradiction:
Loss of energyVSEase of manufacture

Solution Approach 1:

The patent changes the Mg doping concentration parameter to 2×10^19-2×10^20 cm^-3, which is optimized to achieve sufficient hole concentration for high internal quantum efficiency while remaining within the practical limits of Mg doping efficiency and ionization efficiency in GaN materials.

Inventive Principle:
Principle #35Parameter changes

3Loss of energy

If holes are concentrated in the last 3-5 quantum wells to improve distribution, then internal quantum efficiency is affected, but light emission uniformity deteriorates

Engineering Contradiction:
Improveinternal quantum efficiencyVSAvoidlight emission uniformity
Core Design Contradiction:
Loss of energyVSIllumination intensity

Solution Approach 1:

The patent applies local quality by creating specific regions with different properties: the P layer with controlled thickness and defect density, and the electronic blocking layer with optimized hole blocking capability. This local optimization ensures uniform hole distribution across all quantum wells while maintaining high internal quantum efficiency.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances light emitting efficiency while reducing electric leakage and improving anti-static properties by effectively managing defect density and growth conditions in the P-type layer.

Implementation Method 1

the P-type layer comprises a Mg-doped GaN material layer having a Mg impurity concentration of about 2×10^19-2×10^20 cm^-3

Methodology Applied
Scientific EffectDoping: Dopants

Implementation Method 2

forming an N-type layer over the substrate; forming an active layer over the N-type layer; forming an electronic blocking layer over the active layer; forming a P-type layer over the electronic blocking layer

Methodology Applied
Scientific EffectEpitaxy: Epitaxy

Data Source

PatentUS10115858B2Light emitting diode and fabrication method thereof
Publication Date: 2018.10.30 XIAMEN SANAN OPTOELECTRONICS CO LTD
  • US10115858B2 patent drawing
  • US10115858B2 patent drawing
  • US10115858B2 patent drawing

AI summary

A method of fabricating a light emitting diode includes providing a substrate, and forming successively an N-type layer, an active layer, an electronic blocking layer, and a P-type layer over the substrate. The P-type layer includes a Mg-doped GaN material layer having a Mg impurity concentration of about 2×1019-2×1020 cm−3; and has a thickness of less than or equal to about 250 Å, and has a surface density of V-type defects of less than or equal to about 5×106 cm−2. Through these optimized growth conditions for the P-type layer, the light absorption of the P-type layer can be reduced, the electric leakage due to the relatively large density of V-type defects on the surface can be reduced, and the anti-static capacity of the light emitting diode fabricated thereby can be improved.