LED Substrate Heater With Zonal Optical Heating Control

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Solution Overview

Problem

Existing substrate heating methods in semiconductor processing systems, such as resistively heated pedestals, struggle with limited ability to tune localized heating and require significant heating and cooling times, leading to inefficiencies and challenges in thermal uniformity and process control.

Innovation Solution

The use of an optical array, specifically an LED array, for substrate heating in deposition processes, which allows for recipe-controlled, highly tunable localized heating with wavelengths between 530 nm and 1000 nm, encapsulated in a sealed housing and utilizing various clamping systems like vacuum, electrostatic, and mechanical clamping.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of time

If resistively heated pedestals are used for substrate heating, then heating function is provided, but heating and cooling times are significant and thermal uniformity control is limited

Engineering Contradiction:

Improveheating and cooling timesVSAvoidthermal uniformity and temperature adjustment speed

Core Design Contradiction:

Loss of timeVSTemperature

Solution Approach 1:

The heating system is segmented into multiple independent LED zones arranged in concentric circles, allowing separate control of different radial regions. This enables independent temperature adjustment for each zone, improving thermal uniformity control and reducing the time required to achieve target temperature distributions.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The patent replaces resistive heating elements with optical LED heating elements. LEDs provide rapid heating response and can be turned off quickly for cooling, eliminating the thermal inertia associated with resistive heating systems. This substitution dramatically reduces both heating and cooling times while improving temperature control precision.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

2Adaptability or versatility

If resistively heated pedestals are used, then substrate heating is achieved, but ability to tune localized heating is limited

Engineering Contradiction:

Improvelocalized heating controlVSAvoidheating system structure

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The heating system is divided into multiple independently controllable LED zones arranged in concentric circles. Each zone can be adjusted separately to provide localized heating control, allowing precise temperature profiles across different substrate regions without requiring complex mechanical adjustments.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The system employs dynamic control of LED zones with different power levels, enabling real-time adjustment of localized heating patterns. The controller can independently modulate each LED zone's output, providing versatile temperature profiling capabilities that adapt to different process requirements.

Inventive Principle:

Principle #15Dynamics

3Productivity

If LED array is used for substrate heating, then heating efficiency and temperature control are improved, but radiative loss to processing chamber may occur

Engineering Contradiction:

Improveheating efficiency and process speedVSAvoidradiative loss to processing chamber

Core Design Contradiction:

ProductivityVSLoss of energy

Solution Approach 1:

The patent extracts and removes the processing chamber from the heating zone by positioning the LED array and substrate support in a separate vacuum chamber. The LEDs heat the substrate through optical radiation that passes through the chamber window, preventing the processing chamber itself from being heated and reducing radiative energy loss to the chamber environment.

Inventive Principle:

Principle #2Taking out (Extraction)

Solution Approach 2:

The system uses optical radiation as an intermediary to transfer energy from the LED array to the substrate through the vacuum chamber window. This allows heating to occur without direct thermal contact or chamber heating, minimizing radiative energy loss to the processing chamber while maintaining high heating efficiency.

Inventive Principle:

Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The LED array provides efficient, zonal heating control, reduces heating and cooling times, maintains thermal uniformity, and enhances process efficiency by enabling rapid temperature adjustments and minimizing radiative loss to the processing chamber.

Implementation Method 1

The base portion comprises an array of optical elements configured to emit light to optically heat the substrate

Methodology Applied

Scientific EffectOptical heating: Absorption (EM radiation)

Implementation Method 2

the optical elements comprise light emitting diodes configured to emit light having wavelengths between 530 nm and 1000 nm

Methodology Applied

Scientific EffectLight emitting diode emission: Light Emitting Diode

Implementation Method 3

utilizing various clamping systems like vacuum, electrostatic, and mechanical clamping

Methodology Applied

Scientific EffectElectrostatic clamping: Electrostatic Induction

Data Source

PatentUS20260018435A1LED substrate heater for deposition applications

Publication Date: 2026.01.15 LAM RES CORP

AI summary

A pedestal configured to deposit material on a substrate includes a stem portion of the pedestal and a base portion of the pedestal mounted to the stem portion of the pedestal. The base portion includes an array of optical elements configured to emit light to optically heat the substrate.