Lens Array Layer Deposition for High Arch Heights
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Solution Overview
Problem
Existing nano-imprint lens templates formed by photoetching thermal reflow processes are limited in manufacturing lens structures with high arch heights, failing to meet the demands of certain projects.
Innovation Solution
A manufacturing method involving depositing a first film layer on a substrate, forming a tapered structure array through patterning, and covering it with a second film layer to create a lenticular structure array, which includes etching processes and nano-imprint rubber transfer to achieve high arch heights.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If photoetching thermal reflow process is used to form lens template, then manufacturing process is simple, but arch height of lens structure is limited and cannot achieve high arch heights
Solution Approach 1:
The manufacturing process is divided into multiple independent stages: first forming a tapered structure array through photoetching, then depositing material layers to build up the lens structure, and finally using nano-imprint to transfer the pattern. This segmentation allows each stage to contribute to achieving high arch height while maintaining overall process feasibility.
Solution Approach 2:
The tapered structure array is formed in advance through photoetching before the actual lens structure is built. This preliminary action creates a foundation that guides subsequent material deposition and enables the formation of high arch height lenses through controlled material accumulation.
2Manufacturing precision
If nano-imprint process is used to form lens array, then high arch heights can be achieved, but manufacturing complexity increases
Solution Approach 1:
A tapered structure array serves as an intermediary element between the photoetching process and the final lens structure. This intermediate structure simplifies the nano-imprint process by providing a pre-formed pattern that guides material deposition, reducing the complexity of directly forming high arch height lenses through nano-imprint alone.
Solution Approach 2:
The lens structure is formed as a composite of multiple material layers: the tapered structure array material, deposited film layers, and transferred adhesive material. This composite approach allows each material to contribute specific properties, enabling high arch height achievement while managing process complexity through material functionality division.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method enables the production of lens arrays with arch heights exceeding 30 μm, enhancing process flexibility and enabling high-performance lens devices with adjustable arch heights.
Implementation Method 1
depositing a first film layer on a first substrate
Implementation Method 2
adopting a dry-etching process to etch the first film layer to form the tapered structure array
Implementation Method 3
depositing a second film layer on the tapered structure array
Data Source
AI summary
Disclosed in embodiments of the present disclosure are a lens array and a manufacturing method thereof. The manufacturing method for the lens array includes the following steps: depositing a first film layer on a first substrate, and manufacturing and forming a tapered structure array through a patterning process; and depositing a second film layer on the tapered structure array, thereby covering a top of a tapered structure, so as to form a lenticular structure array, wherein a top of a lenticular structure is a cambered surface. The lens array is manufactured by the above manufacturing method, wherein the lens array includes a plurality of lenses arranged in an array, and the arch heights of the plurality of lenses are the same and larger than or equal to a set value.