Lens Cell Support with Divergent Flexures for Lithography

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Solution Overview

Problem

Lithographic systems face errors in pattern transfer due to lens displacements and deformations caused by vibrations and heat, leading to shifts and distortions in the pattern on the substrate.

Innovation Solution

A support apparatus featuring a lens cell and fingers with flexures extending at a divergence angle between 75 and 165 degrees, coupled with a mounting member to stabilize the lens and reduce displacements and deformations, thereby minimizing errors in the printed pattern.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional rigid support structures are used for lenses, then structural strength is maintained, but lens displacements and deformations occur due to vibrations and heat

Engineering Contradiction:

Improvepattern transfer accuracyVSAvoidlens position stability

Core Design Contradiction:

ReliabilityVSStability of the object's composition

Solution Approach 1:

The patent employs flexible fingers with flexures instead of rigid support structures. These flexible elements can deform elastically to accommodate thermal expansion and vibration-induced movements while maintaining continuous support for the lens, thereby preventing both excessive displacement and thermal deformation

Inventive Principle:

Principle #30Flexible shells and thin films

Solution Approach 2:

The support apparatus allows for thermal expansion by designing fingers with specific material properties and geometric configurations that can accommodate dimensional changes due to temperature variations, maintaining lens stability across different thermal conditions

Inventive Principle:

Principle #35Parameter changes

2Stability of the object's composition

If rigid mounting is used to prevent lens displacement, then position stability improves, but thermal deformation increases

Engineering Contradiction:

Improvelens position stabilityVSAvoidthermal deformation

Core Design Contradiction:

Stability of the object's compositionVSTemperature

Solution Approach 1:

Flexible fingers with multiple flexures provide a mounting structure that can thermally expand and contract without generating significant stress on the lens, accommodating temperature changes while maintaining positional stability through elastic deformation

Inventive Principle:

Principle #30Flexible shells and thin films

Solution Approach 2:

The support structure transitions from a static rigid mounting to a dynamic flexible system that can adapt its configuration in response to thermal and vibrational inputs, maintaining optimal support conditions across varying operating conditions

Inventive Principle:

Principle #15Dynamics

3Temperature

If flexible support structures are used to reduce thermal deformation, then thermal compliance improves, but displacement control decreases

Engineering Contradiction:

Improvethermal complianceVSAvoidlens position stability

Core Design Contradiction:

TemperatureVSStability of the object's composition

Solution Approach 1:

The flexible fingers with multiple flexures provide controlled compliance that allows thermal expansion while maintaining position stability through elastic recovery, balancing thermal accommodation with displacement control

Inventive Principle:

Principle #30Flexible shells and thin films

Solution Approach 2:

The support structure is divided into multiple discrete flexures along each finger, allowing localized deformation at each joint while maintaining overall structural integrity and position control through the cumulative effect of multiple compliant elements

Inventive Principle:

Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively reduces lens displacements and deformations, ensuring precise pattern transfer by maintaining stability and compliance, even under varying temperature conditions and stringent displacement requirements.

Implementation Method 1

first and second flexures coupled at first respective ends to and extending from the base at a divergence angle between about 75 and 165 degrees

Methodology Applied

Scientific EffectElastic deformation: Elasticity

Data Source

PatentUS8947634B2Apparatus for supporting an optical element, and method of making same

Publication Date: 2015.02.03 ASML HLDG NV

AI summary

An apparatus for supporting an optical element is provided. The apparatus includes a lens cell (1003) and a plurality of fingers (1000) coupled to the lens cell. Each finger includes a base (1012) configured to be coupled to the optical element when mounted therein, first (1006a) and second (1006b) flexures coupled at first respective ends to and extending from the base (1012) at a divergence angle between about 75 and 165 degrees, and a mounting member (1008) configured to couple together second respective ends of the first and second flexures. The mounting member thereby couples the base (1012) to the lens cell (1003).