Optical Lens Temperature Control via Infrared Feedback
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Solution Overview
Problem
Focal plane drift caused by varying energy density of light exposure in semiconductor fabrication leads to substandard imaging and defective semiconductor products due to lens temperature fluctuations, which existing water-cooling systems inadequately address.
Innovation Solution
A light source control module with an infrared sensor module and controller regulates the temperature of optical lenses by adjusting the emission of infrared light based on detected temperature changes, maintaining a stable focal plane.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If water-cooling systems are used to control lens temperature, then lens temperature can be reduced, but the system complexity increases and focal plane stability is insufficient
Solution Approach 1:
The patent replaces the mechanical water-cooling system with an optical-based temperature control system. An infrared light source emits infrared radiation that is absorbed by the lens to control its temperature, substituting mechanical fluid dynamics with optical energy transfer. This eliminates pumps, tubes, and coolant circulation infrastructure while achieving precise temperature control.
Solution Approach 2:
The system controls lens temperature by adjusting the intensity and wavelength parameters of infrared light emission. By varying these optical parameters dynamically based on real-time temperature feedback, the system achieves precise thermal control without the complexity of mechanical cooling systems, directly addressing both temperature control and system simplicity requirements.
2Adaptability or versatility
If light energy density varies during exposure, then different reticle patterns can be processed, but focal plane drift occurs reducing imaging precision
Solution Approach 1:
The patent implements a closed-loop feedback system where temperature sensors continuously monitor lens temperature and reticle pattern density. This feedback information is used to dynamically adjust infrared light emission intensity, compensating for thermal effects caused by varying light energy density. The system maintains focal plane precision across different reticle patterns by actively counteracting temperature-induced drift through real-time parameter adjustment.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively stabilizes the focal plane, reducing critical dimension and overlay performance deviations, thereby improving the yield and quality of semiconductor products by maintaining consistent lens temperatures.
Implementation Method 1
an infrared sensor module positioned to detect infrared radiation emitted by one or more optical lenses
Implementation Method 2
direct and/or regulate emission of light from one or more infrared light sources... for keeping the temperature of the one or more optical lenses substantially constant
Data Source
AI summary
Embodiments of the present disclosure provide a system and method for stabilizing optical lens temperatures, including detecting infrared radiation emitted from one or more optical lens, generating an infrared sensor signal based upon the detected infrared radiation, directing emission of light from one or more infrared light sources to the one or more optical lenses, and regulating the emission of the light from the one or more infrared light sources based on the infrared sensor signal for adjusting the temperature of the one or more optical lens.