Lens Assemblies With Interrupted Bonding Agent Configuration

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Solution Overview

Problem

In lens systems used in lithography and semiconductor inspection, the degradation of bonding agents due to light exposure leads to contamination and misalignment of optical lenses, affecting equipment performance.

Innovation Solution

The optical lens assembly features a bonding agent arranged in an interrupted configuration around the circumference of the optical lens, positioned to avoid high-intensity regions of the light footprint, minimizing exposure and degradation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If a bonding agent is used to couple the optical lens to the lens holder, then the lens can be securely positioned, but the bonding agent degrades under light exposure leading to contamination and misalignment

Engineering Contradiction:
Improvebonding strengthVSAvoidbonding agent stability
Core Design Contradiction:
StrengthVSReliability

Solution Approach 1:

The bonding agent is applied in a segmented or interrupted configuration rather than as a continuous layer. This segmentation reduces the total surface area of the bonding agent exposed to light, thereby minimizing degradation while maintaining sufficient bonding strength at the discrete bonding locations.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The bonding agent is strategically positioned only in specific regions where bonding is required, rather than covering the entire lens periphery. This local application ensures bonding strength is concentrated where needed while reducing overall light exposure and degradation risk.

Inventive Principle:
Principle #3Local quality

2Strength

If the bonding agent is positioned to maximize bonding strength, then the lens is securely held, but the bonding agent is exposed to high-intensity light regions causing degradation

Engineering Contradiction:
Improvebonding strengthVSAvoidlight exposure to bonding agent
Core Design Contradiction:
StrengthVSObject-affected harmful factors

Solution Approach 1:

The bonding agent is positioned in specific localized regions that balance bonding requirements with light exposure considerations. By carefully selecting bonding locations, the system achieves adequate bonding strength while minimizing exposure to high-intensity light regions.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent utilizes the light intensity distribution pattern to advantage by positioning bonding agents in regions where light intensity is lower. What would normally be considered a limitation (non-uniform light distribution) is converted into a benefit by strategically placing bonding agents in low-intensity zones.

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

3Area of stationary object

If the bonding agent is applied in a continuous configuration, then complete coverage is achieved, but degradation occurs in high-intensity light regions leading to contamination

Engineering Contradiction:
Improvebonding agent coverage areaVSAvoidcontamination from degraded bonding agent
Core Design Contradiction:
Area of stationary objectVSObject-generated harmful factors

Solution Approach 1:

The continuous bonding agent layer is divided into segmented or interrupted sections. This segmentation maintains sufficient total coverage area for bonding while reducing the cumulative surface area exposed to degrading light, thereby minimizing contamination risk.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent effectively 'discards' the notion of continuous bonding agent coverage in favor of a more efficient segmented approach. This allows the system to achieve bonding functionality with reduced material exposure to harmful light, preventing degradation and contamination.

Inventive Principle:
Principle #34Discarding and recovering

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration reduces the degradation of the bonding agent, minimizing contamination and maintaining lens alignment, thereby enhancing the operational stability and performance of the optical system.

Implementation Method 1

an optical lens positioned to transmit and refract light provided by the light source

Methodology Applied
Scientific EffectRefraction: Refraction

Data Source

PatentEP3055725B1Lens assemblies and optical systems incorporating lens assemblies
Publication Date: 2023.03.15 CORNING INC
  • EP3055725B1 patent drawingFigure 1
  • EP3055725B1 patent drawingFigure 2~3
  • EP3055725B1 patent drawingFigure 4

AI summary

An optical system includes a lens assembly and a light source. The lens assembly includes an optical lens positioned to transmit and refract light provided by the light source, and a lens holder coupled to the optical lens and maintaining a position of the optical lens relative to the light source. The optical lens is coupled to the lens holder with a bonding agent arranged in an interrupted configuration at positions proximate to a circumference of the optical lens. The light source provides light to the optical lens of the lens assembly. The light provided to the optical lens has an optical footprint that includes a plurality of high-intensity regions separated from one another by low-intensity regions and the bonding agent is positioned in a circumferential orientation relative to the light source such that the bonding agent is spaced apart from the high-intensity regions of the optical footprint of the light.