Lens Mount Elastomer Annular Structure Thermal Stress
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Solution Overview
Problem
Existing lens mount devices for semiconductor inspection devices face challenges with thermal stress and impact stability due to temperature changes, leading to misalignment and aberrations that affect imaging performance and defect detection sensitivity.
Innovation Solution
A lens mount device with an annular structure featuring a first and second annular part with an elastomer member in the first space and an air gap in the second space, using materials with matching linear expansion coefficients and a silicone rubber elastomer to absorb thermal stress and maintain lens alignment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If the lens mount member is made of metal material with high linear expansion coefficient, then the lens can be easily accommodated, but thermal stress occurs between the lens and lens mount member due to temperature change causing misalignment and aberration
Solution Approach 1:
The patent applies this principle by using an elastomer member as a flexible mounting structure between the lens and lens mount member. The elastomer member can elastically deform to accommodate thermal expansion differences while maintaining lens positioning, thereby reducing thermal stress and preventing misalignment caused by temperature changes.
Solution Approach 2:
The patent applies this principle by changing the material parameter (linear expansion coefficient) of the lens mount member to match that of the lens. This parameter matching reduces the thermal expansion difference between components, minimizing thermal stress and maintaining alignment stability across temperature variations.
2Stability of the object's composition
If the lens is fixed rigidly to the lens mount member, then the lens position is stable, but impact stability is insufficient and the lens may be displaced under large disturbances
Solution Approach 1:
The elastomer member serves as a flexible mounting structure that provides both position stability through elastic restoration and impact stability through shock absorption. The elastic properties allow the lens to return to its original position after disturbance while protecting against displacement under large impacts.
Solution Approach 2:
The elastomer member provides beforehand cushioning by absorbing impact energy before it can displace the lens. This cushioning effect protects the lens from sudden shocks and vibrations during operation, maintaining positioning accuracy under various disturbance conditions.
3Reliability
If a thick elastomer layer is used to absorb thermal expansion difference, then thermal stress is reduced, but the lens may be contaminated by outgas from the elastomer
Solution Approach 1:
The patent uses a thin elastomer member that provides sufficient elastic compliance for thermal expansion accommodation while minimizing the volume of elastomer material. This reduces outgas generation and potential lens contamination compared to thick elastomer layers, balancing thermal management with optical cleanliness.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively reduces thermal stress and maintains lens stability under temperature changes, preventing displacement and maintaining optical performance even under large disturbances, thus enhancing imaging quality and defect detection sensitivity.
Implementation Method 1
the lens mount is given a characteristic (flexure) of an elastic body so that mismatch of the linear expansion coefficient between the lens and the lens mount is absorbed by elastic deformation of the lens mount
Implementation Method 2
the linear expansion coefficient of the lens and the linear expansion coefficient of the lens mount member is different and thermal stress occurs between the lens mount member and the lens due to temperature change
Data Source
AI summary
A lens mount device includes a lens and a lens mount member for holding the lens. The lens mount member has an annular part surrounding the lens. The annular part includes a first annular part having a first inner peripheral surface such that a first space having a first radial dimension is defined between the first inner peripheral surface and an outer peripheral surface of the lens and a second annular part having a second inner peripheral surface such that a second space having a second radial dimension smaller than the first radial dimension is defined between the second inner peripheral surface and the outer peripheral surface of the lens, the first and second annular parts being adjacent to each other in an axial direction of the lens. An elastomer member is placed in the first space without radial gaps. The second space is an air gap.