Lensless 3D Interferometer for High-Resolution Deep UV Imaging
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Solution Overview
Problem
Current methods for reconstructing original images using interferometers without lenses face challenges in achieving high resolution, especially at distances greater than 0.1 m, and are limited by the need for dielectric lenses, particularly in deep UV ranges, while also requiring complex and costly interferometer structures.
Innovation Solution
A method utilizing a three-dimensional interferometer setup with non-planar elements, where the first and second interferometer arms have central beams that generate k perpendicular =0 interference at a superposition point, allowing for high-resolution imaging without lenses and enabling use in wavelengths where dielectric lenses are not available, such as deep UV.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a lensless interferometer is used for imaging, then the device complexity is reduced and cost is lowered, but the measurement precision deteriorates at distances greater than 0.1 m
Solution Approach 1:
The patent transitions from a conventional two-dimensional planar interferometer arrangement to a three-dimensional non-planar configuration. The beam deflecting elements are positioned at different heights and angles, creating a立体 spatial arrangement that enables high-resolution imaging at distances greater than 0.1m without requiring complex lens systems. This dimensional change allows the interferometer to achieve both simplicity and precision simultaneously.
2Measurement precision
If dielectric lenses are used for imaging, then high resolution can be achieved, but the device becomes more complex and costly, and is not suitable for deep UV wavelengths
Solution Approach 1:
The patent extracts and removes the dielectric lens component from the imaging system entirely. By using a lensless interferometer configuration with beam deflecting elements and wavefront inversion, the system achieves high-resolution imaging without requiring any lenses. This extraction eliminates the complexity and cost associated with lens systems while extending applicability to deep UV wavelengths where suitable lenses are unavailable.
Solution Approach 2:
The patent replaces the optical-mechanical lens system with a purely interferometric approach using beam deflecting elements and wavefront manipulation. Instead of using physical lenses to focus and resolve image points, the system uses interferometric measurement principles with inverted wavefronts to achieve the same imaging function, thereby eliminating the need for complex lens assemblies.
3Ease of manufacture
If the interferometer uses planar elements only, then manufacturing is simpler, but imaging capability at distances less than 10 cm is limited
Solution Approach 1:
The patent introduces three-dimensional spatial arrangement of beam deflecting elements with different orientations and positions in space. This non-planar configuration, while still using only flat reflective surfaces, enables the interferometer to image objects at various distances including less than 10 cm. The vertical and angular separation of elements creates the necessary optical path differences for close-range imaging without requiring curved surfaces.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for high-resolution reconstruction of original images at various distances without the need for lenses, using flat reflective elements, and is suitable for wavelengths where dielectric lenses are not feasible, enhancing imaging capabilities and reducing costs.
Implementation Method 1
a first light ray emanating from an image point of the original image to be measured passes through the first interferometer arm, and a second light ray emanating from the image point of the original image to be measured passes through the second interferometer arm, wherein the first light ray and the second light ray overlap at the overlap point of the first central ray and the second central ray after passing through the first and second interferometer arms, respectively, wherein a wave vector component of the first light ray perpendicular to the first central ray and a wave vector component of the second light ray perpendicular to the second central ray are opposite at the overlap point
Data Source
Figure 1a~1b
Figure 2
Figure 3
AI summary
The invention relates to an interferometer, comprising a first interferometer arm and a second interferometer arm, wherein the first interferometer arm and the second interferometer arm are arranged in such a way that a first central beam, originating from a central pixel of an original image to be imaged, passes through the first interferometer arm, a second central beam, originating from the central pixel of the original image to be imaged, passes through the second interferometer arm, wherein, after passing through the first or second interferometer arm, the first central beam and the second central beam are superimposed and generate a kperpendicular=0-interference at a superposition point of the first central beam and the second central beam, a first light beam, originating from a pixel of the original image to be imaged, passes through the first interferometer arm, and a second light beam, originating from a pixel of the original image to be imaged, passes through the second interferometer arm, wherein, after passing through the first or second interferometer arm, the first light beam and the second light beam overlap at the superposition point of the first central beam and the second central beam, and wherein, at the superposition point, a wave vector component of the first light beam, which is perpendicular to the first central beam, and a wave vector component of the second light beam, which is perpendicular to the second central beam, are arranged in an opposing manner. The invention also relates to a method for reconstructing an original image from an image measured using an interferometer according to the invention. The invention further relates to a method for calibrating an interferometer according to the invention.