Levitation Stage Segmented Vacuum for Substrate Transfer Stability
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Solution Overview
Problem
During the fabrication of display devices, substrates with varying thicknesses or warps often experience transfer failures such as slips or misalignment when using conventional levitation stages.
Innovation Solution
The apparatus includes a levitation stage with alternating first and second areas, equipped with rollers, first and second vacuum holes, and controlled pressures. The controller adjusts the pressure based on the substrate's thickness and the type of film formed on it, ensuring stable transfer.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional levitation stage is used to transfer substrates, then the transfer process can be performed, but transfer failures such as slips or misalignment occur when substrates have varying thicknesses or warps
Solution Approach 1:
The levitation stage is divided into multiple areas (first areas and second areas) with different vacuum hole configurations. The first areas have first vacuum holes for substrates without anti-reflective films, while the second areas have second vacuum holes for substrates with anti-reflective films, allowing tailored support for different substrate types
Solution Approach 2:
The vacuum pressure applied to different areas is dynamically adjusted based on substrate characteristics. The controller selectively activates first or second vacuum holes depending on whether the substrate has an anti-reflective film, adapting the transfer mechanism to maintain reliability across varying substrate conditions
2Reliability
If uniform vacuum pressure is applied across the levitation stage, then the system structure is simple, but transfer failures occur for substrates with varying thicknesses or warps
Solution Approach 1:
The vacuum system is segmented into first vacuum holes and second vacuum holes located in different areas of the levitation stage. This segmentation allows different vacuum pressure applications for different substrate types, improving transfer stability without requiring complete system redesign
Solution Approach 2:
Different vacuum characteristics are applied to different local areas of the levitation stage. First areas have first vacuum holes for one type of substrate, while second areas have second vacuum holes for another type, providing localized optimization for various substrate conditions
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables stable transfer of various substrates by optimizing the air pressure control, minimizing transfer failures and ensuring precise positioning during substrate processing.
Implementation Method 1
a plurality of first vacuum holes installed in the first areas and sucking the air at first pressure; and a plurality of second vacuum holes installed in the second areas and sucking the air at second pressure that is different from the first pressure
Data Source
AI summary
An apparatus for processing a substrate is provided. The apparatus includes: a levitation stage transferring a substrate in a first direction and including first areas and second areas, which are arranged in a second direction that is different from the first direction; a plurality of rollers installed in the first areas and transferring the substrate; a plurality of first vacuum holes installed in the first areas and sucking the air at first pressure; and a plurality of second vacuum holes installed in the second areas and sucking the air at second pressure that is different from the first pressure.