Lewis Gas Storage via Reactive Liquid Atomization

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Solution Overview

Problem

The semiconductor industry faces challenges in safely storing and delivering hazardous gases like phosphine, arsine, and boron trifluoride due to their toxicity and pyrophoricity, as well as the risks associated with high-pressure storage in metal cylinders, which can lead to leaks or ruptures.

Innovation Solution

The formation of complexes between Lewis acidic or basic gases and reactive liquids, such as ionic liquids, is enhanced by atomizing the reactive liquid into fine droplets, increasing the surface area for faster complexing and efficient recovery of the gases, using methods like ultrasonic nebulization and controlled temperature and pressure conditions.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If hazardous gases are stored in metal cylinders under high pressure, then storage capacity and delivery efficiency are improved, but safety risks increase due to possibility of leaks or catastrophic rupture

Engineering Contradiction:

Improvedelivery efficiencyVSAvoidsafety

Core Design Contradiction:

ProductivityVSReliability

Solution Approach 1:

The patent changes the pressure parameter from high to low by storing gases as liquid adduct complexes at low pressure, eliminating the need for high-pressure metal cylinders while maintaining storage capacity and delivery efficiency

Inventive Principle:

Principle #35Parameter changes

Solution Approach 2:

The patent introduces a reactive liquid as an intermediary medium that forms liquid adduct complexes with hazardous gases, enabling safe low-pressure storage while allowing controlled delivery through decomposition of the complexes

Inventive Principle:

Principle #24Intermediary (Mediator)

2Quantity of substance

If hazardous gases are compressed and liquefied for storage in cylinders, then storage density is improved, but safety risks worsen due to toxicity and pyrophoricity under high pressure

Engineering Contradiction:

Improvestorage densityVSAvoidtoxicity and pyrophoricity

Core Design Contradiction:

Quantity of substanceVSObject-affected harmful factors

Solution Approach 1:

The reactive liquid acts as an intermediary that chemically binds to hazardous gases forming stable liquid adduct complexes, reducing their toxicity and pyrophoricity while maintaining high storage density

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent changes the chemical state parameter by forming liquid adduct complexes, transforming hazardous gases into safer liquid compounds that maintain high storage density without the harmful properties of the original gases

Inventive Principle:

Principle #35Parameter changes

3Reliability

If Lewis base or Lewis acid gases are complexed in reactive liquids, then safety and handling are improved, but complexing speed and gas recovery efficiency are reduced

Engineering Contradiction:

ImprovesafetyVSAvoidcomplexing speed

Core Design Contradiction:

ReliabilityVSProductivity

Solution Approach 1:

The patent segments the reactive liquid into fine droplets dispersed in a carrier gas, dramatically increasing the surface area available for complexing reactions and thereby accelerating both complexing speed and gas recovery efficiency while maintaining safety benefits

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The patent transitions from bulk liquid phase reactions to aerosol droplet phase reactions, adding a spatial dimension (dispersion in carrier gas) that enhances mass transfer and reaction kinetics without compromising the safety advantages of liquid complexing

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach allows for faster and more efficient complexing and recovery of hazardous gases, reducing the risks associated with high-pressure storage and improving safety and environmental handling by facilitating safer, low-pressure storage and delivery.

Implementation Method 1

atomizing the reactive liquid under conditions for forming droplets of said reactive liquid

Methodology Applied

Scientific EffectAtomization:

Implementation Method 2

controlling the temperature, pressure and concentration of said Lewis gas to provide for (a) the formation of said complex between said gas and reactive liquid

Methodology Applied

Scientific EffectComplex formation: Chemical Bonding

Implementation Method 3

the breaking (fragmentation) of said complex of said Lewis acidic or Lewis basic gases in a reactive liquid of opposite character associated with the recovery of the Lewis gas therefrom

Methodology Applied

Scientific EffectDecomposition: Decomposition (biological)

Data Source

PatentUS7736420B2Contact methods for formation of Lewis gas/liquid systems and recovery of Lewis gas therefrom

Publication Date: 2010.06.15 VERSUM MATERIALS US LLC

AI summary

The invention relates to an improvement in apparatus and process for the formation of a complex of Lewis acidic or Lewis basic gases in a reactive liquid of opposite character and for the breaking (fragmentation) of said complex associated with the recovery of the Lewis gas therefrom. The improvement resides in forming finely divided droplets of reactive liquid and controlling the temperature, pressure and concentration of said Lewis gas of opposite character to provide for (a) the formation of said complex between said gas and reactive liquid or (b) the breaking of said complex and the recovery of the atomized droplets of reactive liquid.