Li-P-N Protective Electrolyte Interlayers for Moisture-Stable Film Deposition
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Solution Overview
Problem
Existing solid state battery technologies face issues with non-uniform and moisture-sensitive solid electrolyte films due to poor quality sputtering targets, leading to defects and contamination, which affect the performance and integrity of the battery components.
Innovation Solution
The development of a nitrogen-rich Li-P-N thin film as a protective coating for solid electrolytes, which is moisture-resistant and mechanically robust, and the use of a composite sputtering target composed of P3N5 and LiPO4 to improve film deposition quality.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If traditional sputtering targets are used, then manufacturing process is simple, but film quality is poor with defects and non-uniformity
Solution Approach 1:
The patent employs composite sputtering targets combining multiple materials (e.g., Li2SiO3 and P3N5) to achieve superior film quality. The composite target structure allows for controlled deposition of multi-layer protective films with enhanced uniformity and reduced defects, directly resolving the contradiction between film quality and fabrication complexity by pre-integrating multiple materials into a single target component.
Solution Approach 2:
The patent applies preliminary surface treatments and pre-deposition steps to the sputtering target and substrate before main film deposition. This includes surface cleaning, plasma treatment, and seed layer formation, which ensure uniform nucleation and growth of the protective film, thereby improving film quality without requiring complex post-processing.
2Ease of operation
If solid electrolyte films are exposed to ambient environment, then handling is easy, but moisture sensitivity causes adverse reactions
Solution Approach 1:
The patent deposits protective films (Li2SiO3, P3N5, or their composites) that create an inert barrier between the moisture-sensitive solid electrolyte and the ambient environment. This allows the battery components to be handled and stored in less stringent atmospheric conditions while preventing hydrolysis and adverse reactions, thus improving ease of operation without compromising protection.
Solution Approach 2:
The protective film acts as an intermediary layer between the solid electrolyte and the ambient environment. This intermediary barrier prevents direct contact between moisture and the sensitive electrolyte material, enabling easier handling and storage while maintaining chemical stability through the mediating protective layer.
3Manufacturing precision
If high purity target material is used, then film uniformity is improved, but manufacturing cost increases
Solution Approach 1:
The patent uses composite target materials that combine lower-cost components (like Li2SiO3 glass ceramic) with smaller amounts of high-performance materials (like P3N5). This composite approach achieves uniform film deposition and desired protective properties while reducing overall material cost compared to using exclusively high-purity materials throughout.
Solution Approach 2:
The patent optimizes deposition parameters (power, pressure, gas flow rates, deposition time) to maximize film uniformity from targets with moderate purity levels. By carefully controlling process parameters, the system achieves high-quality uniform films without requiring excessively pure target materials, thereby reducing material costs while maintaining manufacturing precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The nitrogen-rich Li-P-N film enhances the stability and performance of solid electrolytes by preventing reactions with moisture and carbon dioxide, while the composite target ensures uniform and high-quality film deposition, improving the overall integrity and efficiency of solid-state batteries.
Implementation Method 1
films deposited by sputtering methods
Implementation Method 2
lithium metal, which is deposited onto the as-deposited conversion type interlayer film, reactively converts the interlayer film composition and properties
Data Source
AI summary
An intermediary solid electrolyte structure having a Li ion conducting solid electrolyte layer covered with a thin as-deposited lithium phosphorus nitride film. A surface protected solid electrolyte having a solid electrolyte layer having a first major surface that is covered by a composite protective film, the composite protective film having a lithium phosphorus material component and a phosphorus nitride material component. A physical vapor deposition target for the deposition of a composite protective film, the target having a compacted composite material target having a mosaic structure. Methods of making thin films.