Lid Holding Sensor for Cassette Attachment Verification

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Solution Overview

Problem

In processing systems where substrates like semiconductor wafers are stored in cassettes with high sealing performance, there is a risk of substrates popping out during transportation due to improper mounting or locking of the lid, leading to safety and sealing issues.

Innovation Solution

A substrate storage apparatus and method that includes a stage with a cassette having an opening and a detachable lid, a lid attaching/detaching plate, and a lid holding sensor to detect whether the lid is properly mounted, with a controller determining the presence of abnormalities in the attachment/detachment process based on sensor data.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If a lid attaching/detaching mechanism is used, then substrate access is improved, but the complexity of the system increases

Engineering Contradiction:

Improvesubstrate accessVSAvoidsystem complexity

Core Design Contradiction:

Ease of operationVSDevice complexity

Solution Approach 1:

The lid attaching/detaching plate automatically performs the attachment and detachment operations without requiring manual intervention. The plate moves to the mounting position to attach the lid to the cassette opening and can detach it when needed, making the system self-serving and reducing operational complexity despite the added mechanical components

Inventive Principle:

Principle #25Self-service

Solution Approach 2:

The lid attaching/detaching plate serves multiple functions: it attaches the lid to the cassette opening, holds the lid in place during operations, and can detach the lid when needed. This multi-functionality justifies the added complexity by consolidating multiple operations into a single mechanism

Inventive Principle:

Principle #6Universality (Multi-functionality)

2Ease of operation

If the lid attaching/detaching plate moves to the mounting position, then lid attachment is enabled, but the time required for the process increases

Engineering Contradiction:

Improvelid attachment capabilityVSAvoidattachment process time

Core Design Contradiction:

Ease of operationVSLoss of time

Solution Approach 1:

The lid holding sensor performs detection of the lid attachment state before the lid attaching/detaching plate moves to the mounting position. This preliminary action allows the system to determine in advance whether attachment is needed and to prepare accordingly, reducing unnecessary movements and time consumption in the overall process

Inventive Principle:

Principle #10Preliminary action

Data Source

PatentUS11699608B2Substrate storage apparatus, substrate storage method, and recording medium

Publication Date: 2023.07.11 TOKYO ELECTRON LTD

AI summary

A substrate storage apparatus includes a stage on which a cassette that has a lid detachably mounted to an opening is disposed, a lid attaching/detaching plate that performs attaching/detaching of the lid to/from the opening of the cassette disposed on the stage, and is provided to be movable between a mounting position in contact with the lid disposed at a position of the opening and a retracted position not in contact with the lid disposed at the position of the opening, a lid holding sensor that detects whether the lid is being held by the lid attaching/detaching plate, and a controller that determines presence/absence of abnormality related to attachment/detachment of the lid based on a detection result of the lid holding sensor.