Lid Opening System for Semiconductor Pods Using Sliding Latch

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Solution Overview

Problem

Conventional lid opening/closing systems for semiconductor processing pods face challenges in controlling dust particles and ensuring reliable engagement of large-diameter wafer pods, leading to potential detachment issues during transportation and compromised air-tightness.

Innovation Solution

A lid opening/closing system featuring a flat plate-like lid with a latch mechanism that slides along an axis, utilizing a latch mechanism drive and sensors for precise engagement and detection, ensuring reliable fixation and reduced dust generation, with a design that allows for stable engagement and easy detection of the lid's position.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If conventional key members are used to extend and retract tongues for lid engagement, then the lid can be opened and closed, but dust is generated through contact, rotation and sliding that may diffuse into the mini-environment

Engineering Contradiction:

Improvelid opening/closing operationVSAvoiddust generation

Core Design Contradiction:

Ease of operationVSObject-generated harmful factors

Solution Approach 1:

The patent extracts the harmful key member that causes dust generation and replaces it with a dust-free engagement mechanism. The new system uses a protrusion that fits into a recess without requiring sliding contact or rotation, eliminating the source of dust particles that could contaminate the mini-environment.

Inventive Principle:

Principle #2Taking out (Extraction)

Solution Approach 2:

The patent replaces the mechanical sliding and rotating key member system with a simpler insertion-based mechanism. Instead of using a key member that slides and rotates to engage tongues, the system uses a protrusion that is simply inserted into a recess, eliminating complex mechanical movements that generate dust.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

2Adaptability or versatility

If the pod is transferred in a low cleanliness space, then dust and hydrocarbons adhere to the pod surfaces, but the downward air flow should remove these contaminants

Engineering Contradiction:

Improvepod transfer capabilityVSAvoiddust and hydrocarbon contamination

Core Design Contradiction:

Adaptability or versatilityVSObject-affected harmful factors

Solution Approach 1:

The patent acknowledges that dust and contaminants will adhere to the pod during transfer but converts this potential harm into a manageable situation by designing the engagement mechanism to occur without generating additional dust. The protrusion-recess system ensures that even if surfaces are contaminated, the engagement action itself does not create new particles or dislodge existing ones into the mini-environment.

Inventive Principle:

Principle #22Blessing in disguise (Convert harm into benefit)

3Device complexity

If a simple latch mechanism is used for lid fixation, then the structure is simplified, but reliable engagement and detection of engagement status becomes difficult

Engineering Contradiction:

Improvelatch mechanism structureVSAvoidengagement reliability and detection

Core Design Contradiction:

Device complexityVSReliability

Solution Approach 1:

The patent incorporates a sensor that detects whether the protrusion is properly engaged with the recess. This feedback mechanism provides confirmation of successful engagement without adding complex mechanical indicators. The sensor system allows the control unit to verify engagement status and determine when the pod is ready for transfer, maintaining simplicity while ensuring reliability.

Inventive Principle:

Principle #23Feedback

4Object-generated harmful factors

If the latch mechanism uses a protrusion and recess without sliding contact, then dust generation is reduced, but the mechanism for engaging and disengaging the lid must be simplified

Engineering Contradiction:

Improvedust generation during engagementVSAvoidengagement mechanism structure

Core Design Contradiction:

Object-generated harmful factorsVSDevice complexity

Solution Approach 1:

The patent removes the sliding and rotating components that cause dust generation, leaving only the essential insertion motion. The protrusion is simply inserted into the recess to engage the lid, and withdrawn to disengage it. This extraction of harmful mechanical actions results in a cleaner, simpler mechanism that maintains functionality while eliminating dust generation.

Inventive Principle:

Principle #2Taking out (Extraction)

Data Source

PatentUS8657346B2Lid opening/closing system for closed container

Publication Date: 2014.02.25 TDK CORP

AI summary

The FIMS system is for use with a pod composed of a lid having an engaged portion provided on the outer surface thereof and a pod body having a latch mechanism including an engagement portion that engages the engaged portion as it moves along a predetermined axis to fix the lid to the pod. The FIMS system has a latch mechanism drive means for driving the latch mechanism along a certain axis and an engagement portion position sensor that can generate a signal indicating whether the engagement portion is at an engagement position or non-engagement position when the latch mechanism drive means drives the latch mechanism. The latch mechanism drive means and the engagement portion position sensor are provided in the vicinity of a first opening portion of the FIMS system.