Lid Member Resonance Frequency Adjustment
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Solution Overview
Problem
Existing vibrating sensor devices face challenges in adjusting the resonance frequency of the upper lid after assembly, leading to manufacturing variations and degraded detection accuracy due to resonance interference between the lid and the vibrating sensor element.
Innovation Solution
A manufacturing method that involves housing a vibrator element in a substrate and a lid member, with the lid member having a frequency adjustment mark formed by removing a part of it, allowing for post-assembly adjustment of the resonance frequency to prevent resonance interference.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the resonance frequency of the upper lid is adjusted by a stepped structure in the side surface, then the resonance frequency can be adjusted, but it is difficult to adjust the resonance frequency after assembly of the vibrating sensor device
Solution Approach 1:
The patent applies preliminary action by forming a removed portion in the upper lid before assembly, allowing the resonance frequency to be adjusted in advance. The removed portion is created during the manufacturing process before the lid is assembled to the package, enabling frequency adjustment without requiring post-assembly modifications.
Solution Approach 2:
The patent changes the physical parameter of the upper lid by removing a portion of it, thereby altering the resonance frequency. By controlling the size, shape, and position of the removed portion, the resonance frequency can be precisely adjusted to match or exceed the vibrating sensor element's frequency, preventing resonance interference.
2Manufacturing precision
If the resonance frequency of the upper lid is adjusted by shaping, then the resonance frequency changes, but manufacturing variations cannot be addressed
Solution Approach 1:
The patent enables parameter changes by creating a removed portion with controllable dimensions and geometry. This allows the resonance frequency to be adjusted within a range, providing adaptability to compensate for manufacturing variations in the vibrating sensor element frequency.
Solution Approach 2:
By performing the frequency adjustment through removed portions during the manufacturing process rather than relying solely on fixed shaping, the invention allows for preliminary tuning that can account for and compensate for manufacturing variations before final assembly.
3Reliability
If the resonance frequency of the upper lid is close to the frequency of the vibrating sensor element, then the lid and sensor element resonate, but detection accuracy is degraded
Solution Approach 1:
The patent applies preliminary anti-action by creating a removed portion in the upper lid to proactively prevent resonance interference. By adjusting the resonance frequency of the lid to be equal to or higher than the vibrating sensor element frequency through the removed portion, the invention prevents the harmful resonance effect before it can degrade detection accuracy.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method effectively suppresses unnecessary vibrations and fluctuations in zero-point outputs, enhancing the detection accuracy of the electronic device by ensuring the resonance frequency of the lid is sufficiently apart from the vibration frequencies of the vibrator elements across the operation temperature range.
Implementation Method 1
when the resonance frequency of the upper lid and the frequency of the vibrating sensor element are close to each other, the upper lid and the vibrating sensor element resonate
Data Source
AI summary
A manufacturing method for an electronic device includes a housing step of housing a vibrator element in a housing space formed by a substrate and a lid member, and an adjustment step of adjusting a resonance frequency of the lid member by removing a part of the lid member. The method further includes an inspection step of determining whether to perform the adjustment step. At the inspection step, performing the adjustment step is determined when the resonance frequency of the lid member is within a vibration frequency band of the vibrator element. At the adjustment step, a part of the lid member is removed by laser cutting.


