Semiconductor Package Lid Slit and Heat Pipe Thermal Isolation

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Solution Overview

Problem

In 2.5D semiconductor packages, thermal management is challenging due to thermal coupling between IC chips with different power dissipation levels, leading to overheating and potential device failure.

Innovation Solution

A slit is formed through the semiconductor package lid at the boundary between IC chips to prevent heat flow, and vertical heat pipes are inserted through co-axial holes in the lid and heat sink for direct thermal contact with IC chips, ensuring effective heat dissipation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If multiple IC chips are mounted close together in a 2.5D package, then performance and bandwidth are improved, but thermal coupling between chips increases causing overheating

Engineering Contradiction:
Improveperformance and bandwidthVSAvoidjunction temperature
Core Design Contradiction:
ProductivityVSTemperature

Solution Approach 1:

The lid is segmented by forming slits that divide it into separate thermal zones corresponding to each IC chip. These slits create thermal barriers that prevent heat from one chip from coupling to adjacent chips, while the lid still provides mechanical support and thermal path to heat sink for each chip independently.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The thermal management solution applies different thermal conductivity properties to different regions of the lid. Areas above IC chips maintain high thermal conductivity for heat dissipation, while regions corresponding to slit locations have reduced thermal conductivity to block thermal coupling between adjacent chips.

Inventive Principle:
Principle #3Local quality

2Loss of energy

If a traditional heat sink with fins is used, then heat dissipation is provided, but thermal interaction between adjacent IC chips continues due to heat flow through the heat sink

Engineering Contradiction:
Improveheat dissipationVSAvoidthermal interaction
Core Design Contradiction:
Loss of energyVSTemperature

Solution Approach 1:

The harmful thermal coupling path through the heat sink is extracted and eliminated by replacing the traditional fin-based heat sink with vertical heat pipes that provide dedicated, isolated thermal paths from each IC chip directly to the heat sink base, preventing heat flow between adjacent chips through the heat dissipation structure.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

Vertical heat pipes are introduced as intermediary thermal conduction elements between each IC chip and the heat sink. These heat pipes provide efficient heat transfer from chips to the heat sink while their vertical orientation and direct contact configuration prevent lateral heat flow that would cause thermal coupling between adjacent chips.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Temperature

If slits are formed through the lid to reduce thermal coupling, then thermal interaction between chips is reduced, but the lid structure becomes more complex

Engineering Contradiction:
Improvethermal interactionVSAvoidlid structure
Core Design Contradiction:
TemperatureVSDevice complexity

Solution Approach 1:

The lid is segmented by forming slits that divide it into separate thermal zones corresponding to each IC chip. These slits create thermal barriers that prevent heat from one chip from coupling to adjacent chips, while the lid still provides mechanical support and thermal path to heat sink for each chip independently.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution reduces thermal interaction between IC chips, enables faster heat dissipation, and results in a smaller and lighter thermal solution size, effectively addressing the overheating issue in semiconductor packages.

Implementation Method 1

at least one vertical heat pipe in direct thermal contact with an IC chip and a heat sink

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 2

A heat sink 117 is formed over the lid 111

Methodology Applied
Scientific EffectHeat dissipation: Heat Sink

Data Source

PatentUS10461067B2Thermally enhanced package to reduce thermal interaction between dies
Publication Date: 2019.10.29 GLOBALFOUNDRIES US INC
  • US10461067B2 patent drawing
  • US10461067B2 patent drawing
  • US10461067B2 patent drawing

AI summary

A method of reducing heat flow between IC chips and the resulting device are provided. Embodiments include attaching plural IC chips to an upper surface of a substrate; forming a lid over the IC chips; and forming a slit through the lid at a boundary between adjacent IC chips.