Lid Splash Shielding for Substrate Liquid Treatment
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Solution Overview
Problem
The existing substrate liquid treatment apparatuses for semiconductor manufacturing, particularly those using phosphoric acid aqueous solutions, face challenges in preventing the splash of treatment liquids from scattering and contaminating the environment around the treatment tank, as conventional auto covers are insufficient in containing the droplets.
Innovation Solution
A substrate liquid treatment apparatus with an inner tank and an outer tank configuration, featuring a lid with a splash shielding portion that extends from above the inner tank's sidewall to the outer tank's side, preventing splashes from reaching outside areas by guiding them back into the outer tank.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If an auto cover is provided to prevent droplets from scattering, then the environment around the treatment tank is protected, but the auto cover cannot sufficiently prevent droplets of phosphoric acid aqueous solution from scattering around the treatment tank
Solution Approach 1:
The lid structure extends in the vertical dimension beyond the tank wall, creating a three-dimensional barrier that deflects splashes back into the tank. The splash shielding portion projects downward from the main portion, forming a protective overhang that changes the spatial arrangement from a simple horizontal cover to a multi-level structure effective at intercepting vertical and radial splash trajectories.
Solution Approach 2:
The lid acts as an intermediary element between the boiling treatment liquid and the external environment. By positioning the lid with its main portion above the liquid level and the splash shielding portion extending downward, it serves as a mediating barrier that intercepts splashes before they can reach the external environment, while still allowing the boiling process to continue uninterrupted.
2Productivity
If the treatment liquid is maintained in a boiling state for wet etching, then the etching process is effective, but droplets are generated and scatter around the inner tank
Solution Approach 1:
The lid structure converts the harmful effect of boiling-generated splashes into a beneficial contained environment. By providing the splash shielding portion that extends downward, the structure redirects the kinetic energy of splashing droplets back into the treatment liquid rather than allowing them to escape, thus maintaining etching efficiency while eliminating contamination.
3Object-affected harmful factors
If a lid with splash shielding portion is provided to prevent splashes, then droplet scattering is prevented, but the device structure becomes more complex
Solution Approach 1:
The lid is segmented into two distinct functional portions: the main portion that covers the upper opening and the splash shielding portion that extends downward. This segmentation allows each part to perform its specific function optimally - the main portion provides general coverage while the splash shielding portion specifically addresses droplet containment, making the overall structure more effective despite the added complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Effectively prevents the phosphoric acid aqueous solution from scattering outside the treatment tank, maintaining a cleaner environment and ensuring the phosphoric acid concentration and silicon concentration can be controlled within the circulation system, thereby improving treatment uniformity and reducing contamination risks.
Implementation Method 1
The phosphoric acid aqueous solution in the inner tank is maintained in a boiling state. For this reason, every time the bubbles generated by boiling reach the liquid surface, droplets of the phosphoric acid aqueous solution are generated and scatter around the inner tank.
Data Source
AI summary
A substrate liquid treatment apparatus includes an inner tank configured to store a treatment liquid and having an upper opening, an outer tank disposed outside the inner tank, and a lid movable between a close position for closing the upper opening of the inner tank and an open position for opening the upper opening of the inner tank. The lid includes a main portion that covers the upper opening of the inner tank when the lid is positioned at the close position, and a splash shielding portion connected to the main portion. When the lid is positioned at the close position, the splash shielding portion extends from a position higher than an upper end of a side wall of the inner tank adjacent to the splash shielding portion to a position which is lower than the upper end of the side wall and which is on the outer tank side of the side wall.