LiDAR Micro-Mirror Flexible Support for Linear Torque Control
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Solution Overview
Problem
The existing light steering systems face challenges in maintaining linear torque with respect to rotation angle due to varying spring stiffness, which complicates the control of micro-mirrors and increases the moment of inertia, leading to non-linear torque requirements and potential structural integrity issues.
Innovation Solution
The proposed solution involves a light steering system with micro-mirror assemblies that utilize flexible support structures with different spring stiffness for movement towards and away from the micro-mirror, and a mechanical amplification scheme using a comb drive and indirect rotation, reducing the moment of inertia and making the torque more linear with respect to the rotation angle.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If high spring stiffness is used in the connection structure to maintain structural integrity of the pivot point, then structural integrity is improved, but the non-linearity of the required torque with respect to rotation angle increases
Solution Approach 1:
The connection structure is divided into multiple segments: a first connection structure connecting the micro-mirror to the substrate, and a second connection structure connecting the first connection structure to the substrate. This segmentation allows each segment to have optimized spring stiffness characteristics, reducing overall non-linearity while maintaining structural integrity at the pivot point.
Solution Approach 2:
Different portions of the connection structure have different spring stiffness characteristics. The first connection structure has lower spring stiffness to reduce non-linearity, while the second connection structure provides additional support. This local differentiation of mechanical properties allows simultaneous optimization of linearity and structural integrity.
2Force
If the moment of inertia of the micro-mirror is reduced to reduce the torque required for rotation, then the required torque is reduced, but the structural integrity of the pivot point may be compromised due to lower spring stiffness requirements
Solution Approach 1:
The connection structure is segmented into multiple parts with different mechanical properties. The first connection structure has optimized dimensions and material properties to provide appropriate spring stiffness for maintaining pivot point integrity, while the overall system requires less torque due to reduced micro-mirror moment of inertia.
Solution Approach 2:
The dimensions, shape, and material properties of the connection structures are optimized to achieve the desired spring stiffness characteristics. By adjusting parameters such as thickness, length, and material modulus, the system achieves both reduced torque requirements and maintained structural integrity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach simplifies the control of micro-mirrors by ensuring a more linear relationship between torque and rotation angle, reduces the moment of inertia, and enhances the structural integrity of the pivot points, thereby improving the overall efficiency and accuracy of light steering systems.
Implementation Method 1
the first flexible support structure and the second flexible support structure being configured to allow the first and second connection points to move when the micro-mirror rotates
Implementation Method 2
an actuator configured to rotate the micro-mirror to reflect light emitted by a light source out of the LiDAR module or light received by the LiDAR module to a receiver
Data Source
AI summary
In one example, an apparatus being part of a Light Detection and Ranging (LiDAR) module is provided. The apparatus comprises a microelectromechanical system (MEMS) and a substrate. The MEMS comprising an array of micro-mirror assemblies, each micro-mirror assembly comprises: a first flexible support structure and a second flexible support structure connected to the substrate; a micro-mirror comprising a first connection structure and a second connection structure, the first connection structure being connected to the first flexible support structure at a first connection point, the second connection structure being connected to the second flexible support structure at a second connection point, the first and second connection points being aligned with a rotation axis around which the micro-mirror rotates, the first flexible support structure and the second flexible support structure being configured to allow the first and second connection points to move when the micro-mirror rotates.


