LiDAR Micro-Mirror Flexible Support for Linear Torque Control

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

The existing light steering systems face challenges in maintaining linear torque with respect to rotation angle due to varying spring stiffness, which complicates the control of micro-mirrors and increases the moment of inertia, leading to non-linear torque requirements and potential structural integrity issues.

Innovation Solution

The proposed solution involves a light steering system with micro-mirror assemblies that utilize flexible support structures with different spring stiffness for movement towards and away from the micro-mirror, and a mechanical amplification scheme using a comb drive and indirect rotation, reducing the moment of inertia and making the torque more linear with respect to the rotation angle.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If high spring stiffness is used in the connection structure to maintain structural integrity of the pivot point, then structural integrity is improved, but the non-linearity of the required torque with respect to rotation angle increases

Engineering Contradiction:
Improvestructural integrity of pivot pointVSAvoidlinearity of torque with rotation angle
Core Design Contradiction:
StrengthVSEase of operation

Solution Approach 1:

The connection structure is divided into multiple segments: a first connection structure connecting the micro-mirror to the substrate, and a second connection structure connecting the first connection structure to the substrate. This segmentation allows each segment to have optimized spring stiffness characteristics, reducing overall non-linearity while maintaining structural integrity at the pivot point.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different portions of the connection structure have different spring stiffness characteristics. The first connection structure has lower spring stiffness to reduce non-linearity, while the second connection structure provides additional support. This local differentiation of mechanical properties allows simultaneous optimization of linearity and structural integrity.

Inventive Principle:
Principle #3Local quality

2Force

If the moment of inertia of the micro-mirror is reduced to reduce the torque required for rotation, then the required torque is reduced, but the structural integrity of the pivot point may be compromised due to lower spring stiffness requirements

Engineering Contradiction:
Improvetorque required for rotationVSAvoidstructural integrity of pivot point
Core Design Contradiction:
ForceVSStrength

Solution Approach 1:

The connection structure is segmented into multiple parts with different mechanical properties. The first connection structure has optimized dimensions and material properties to provide appropriate spring stiffness for maintaining pivot point integrity, while the overall system requires less torque due to reduced micro-mirror moment of inertia.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The dimensions, shape, and material properties of the connection structures are optimized to achieve the desired spring stiffness characteristics. By adjusting parameters such as thickness, length, and material modulus, the system achieves both reduced torque requirements and maintained structural integrity.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach simplifies the control of micro-mirrors by ensuring a more linear relationship between torque and rotation angle, reduces the moment of inertia, and enhances the structural integrity of the pivot points, thereby improving the overall efficiency and accuracy of light steering systems.

Implementation Method 1

the first flexible support structure and the second flexible support structure being configured to allow the first and second connection points to move when the micro-mirror rotates

Methodology Applied
Scientific EffectElasticity: Elasticity

Implementation Method 2

an actuator configured to rotate the micro-mirror to reflect light emitted by a light source out of the LiDAR module or light received by the LiDAR module to a receiver

Methodology Applied
Scientific EffectReflection: Reflection

Data Source

PatentUS11796638B2Mirror assembly for light steering with flexible support structure
Publication Date: 2023.10.24 BEIJING VOYAGER TECH CO LTD
  • US11796638B2 patent drawing
  • US11796638B2 patent drawing
  • US11796638B2 patent drawing

AI summary

In one example, an apparatus being part of a Light Detection and Ranging (LiDAR) module is provided. The apparatus comprises a microelectromechanical system (MEMS) and a substrate. The MEMS comprising an array of micro-mirror assemblies, each micro-mirror assembly comprises: a first flexible support structure and a second flexible support structure connected to the substrate; a micro-mirror comprising a first connection structure and a second connection structure, the first connection structure being connected to the first flexible support structure at a first connection point, the second connection structure being connected to the second flexible support structure at a second connection point, the first and second connection points being aligned with a rotation axis around which the micro-mirror rotates, the first flexible support structure and the second flexible support structure being configured to allow the first and second connection points to move when the micro-mirror rotates.