Lift Pin Assembly Height Alignment Under Frame Deformation
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional lift pin assemblies struggle with adjusting the heights of lift pins accurately, especially when dealing with large substrates, leading to potential defects during substrate processing due to fixed coupling and potential deformation of the lifting frame.
Innovation Solution
A lift pin assembly featuring a level bolt with a weight at the lower end, supported by a pressing bracket that can be adjusted in height to maintain a specific gap from the top surface of the weight, allowing for precise alignment and adjustment of lift pins, including a pressing part and fixing part to ensure proper positioning.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If lift pins are fixedly coupled to the lifting frame through fastening units, then the structure is simple and easy to manufacture, but the height adjustment of lift pins becomes difficult and setting failure occurs
Solution Approach 1:
The lift pin assembly is divided into separate components: the lift pin, the level bolt, and the pressing bracket. The level bolt can be independently adjusted relative to the lifting frame, and the pressing bracket can be independently positioned. This segmentation allows each component to be optimized for its specific function while enabling height adjustment without redesigning the entire assembly.
Solution Approach 2:
The system transitions from a fixed, rigid connection to a dynamic, adjustable configuration. The level bolt can be positioned at different heights along the lifting frame, and the pressing bracket can be adjusted to maintain the correct gap from the weight. This dynamic adjustability resolves the contradiction between simple fixed structure and ease of height adjustment.
2Adaptability or versatility
If multiple lift pins are provided for large-size substrate, then the substrate can be loaded/unloaded, but height alignment setting becomes difficult when pins have different heights
Solution Approach 1:
The system allows changing the positional parameter (height) of each level bolt independently along the lifting frame. By adjusting the level bolt position parameter, the corresponding lift pin height can be compensated to achieve alignment, even when the lifting frame deforms or when pins have different initial heights.
3Adaptability or versatility
If the lifting frame is deformed from level status, then the structure can adapt to substrate variations, but the height of each lift pin needs to be re-set
Solution Approach 1:
The level bolts are pre-configured to be adjustable in height before operation. When the lifting frame deforms, the level bolts can be quickly repositioned to compensate for the deformation, and the pressing brackets are pre-set to maintain the correct gap. This preliminary configurability reduces the time needed for height setting after deformation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enhances the level work efficiency and prevents setting failures of lift pins, ensuring accurate alignment and operation even when the lifting frame is deformed, thereby reducing substrate defects.
Implementation Method 1
a lift pin having a weight provided at a lower end of the lift pin, and supported by the level bolt... moved down by self-weight when the first frame is moved down
Implementation Method 2
a pressing bracket to forcibly move down the lift pin, when the lift pin is locked into the pin hole
Data Source
AI summary
A lift pin assembly is provided. The lift pin assembly includes a level bolt mounted on a first frame lifted by a lifting device, a lift pin having a weight provided at a lower end of the lift pin, and supported by the level bolt, and a pressing bracket to forcibly move down the lift pin, when the lift pin is locked into a pin hole. The pressing bracket is adjusted in height to be set while maintaining a specific gap to a top surface of the weight.