Lift Pin Unit Magnetic Alignment for Semiconductor Substrate Handling
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Solution Overview
Problem
In substrate treatment apparatuses, misalignment of lift pins during initial setup or prolonged use leads to contact with the inner surface of pin holes, resulting in particle generation, which affects the precision and cleanliness of semiconductor fabrication processes.
Innovation Solution
A lift pin unit with a joint system that includes magnetic substances for alignment and a flexible design, allowing the lift pin to move freely within a pin hole while maintaining precise alignment through repulsive forces, minimizing contact with the pin hole inner surface.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If lift pins are fixed rigidly to the support plate, then alignment precision is improved, but the system cannot compensate for misalignment during operation or prolonged use
Solution Approach 1:
The joint unit enables dynamic adjustment between the lift pin and support plate, allowing the system to adapt to misalignment conditions while maintaining precise positioning. The movable connection permits real-time compensation for dimensional changes or positional deviations that occur during operation or prolonged use, resolving the contradiction between initial precision and ongoing reliability.
2Reliability
If lift pins are made flexible to allow movement, then alignment compensation is improved, but contact with pin hole inner surface increases causing particle generation
Solution Approach 1:
The joint unit acts as an intermediary mechanism between the lift pin and support plate, enabling controlled movement and alignment compensation while preventing direct contact between the lift pin and pin hole inner surface. This mediator structure allows the system to achieve reliability through flexibility without generating harmful particles from friction or contact.
3Strength
If threaded connection is used between lift pin and pin holder, then coupling strength is improved, but misalignment causes contact with pin hole inner surface
Solution Approach 1:
The joint unit replaces the rigid threaded connection with a dynamic movable connection that maintains coupling strength while allowing alignment compensation. This enables the system to preserve strong coupling between the lift pin and support plate structure, yet accommodates misalignment by permitting controlled movement, thereby preventing contact with the pin hole inner surface.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution ensures precise alignment and minimizes particle generation by preventing contact between the lift pin and the pin hole inner surface, enhancing the cleanliness and reliability of semiconductor fabrication processes.
Implementation Method 1
the lift pin may have a first magnetic substance formed at a lower end thereof, and the support plate may have a second magnetic substance provided thereon and having an opposite polarity to a polarity of the first magnetic substance
Implementation Method 2
an inner wall of the pin hole may include a third magnetic substance, and the lift pin is provided on an outer circumferential surface thereof with a fourth magnetic substance having a polarity the same as a polarity of the third magnetic substance
Data Source
AI summary
Provided is a substrate supporting unit. The substrate supporting unit includes a susceptor supporting the substrate and having a pin hole vertically formed therein, a lift pin provided to move up and down along the pin hole, a support plate supporting the lift pin, and a driving unit vertically moving the support plate. The lift pin has a first magnetic substance formed at a lower end thereof. The support plate has a second magnetic substance provided thereon and having an opposite polarity to a polarity of the first magnetic substance.