Lifting Cooling Unit for Deposition Chamber
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Solution Overview
Problem
Conventional deposition devices face challenges in maintaining effective cooling efficiency and reducing refrigerant leaks due to the complex structure required for sealing the rotary joint, which leads to uneven cooling surfaces and reduced efficiency.
Innovation Solution
A deposition device with a lifting mechanism that positions the cooling unit above the rotating table, allowing it to face the workpieces from the side, eliminating the need for a rotary joint and ensuring consistent cooling across the entire circumference of the cooling unit.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the cooling unit rotates together with the workpieces on the rotating table, then the cooling unit can maintain contact with the workpieces during deposition, but the cooling efficiency is degraded because only certain portions of the cooling surface face the workpieces at all times
Solution Approach 1:
Instead of rotating the cooling unit together with the workpieces, the invention inverts the approach by keeping the cooling unit stationary while allowing the workpieces to rotate. This inversion enables all portions of the cooling surface to face the workpieces during rotation, maximizing cooling efficiency while maintaining continuous contact.
Solution Approach 2:
The invention positions the cooling unit in a different spatial dimension - vertically above the rotating table rather than on the same horizontal plane. This dimensional change allows the cooling unit to remain stationary while still effectively cooling all rotating workpieces, resolving the contradiction between contact maintenance and cooling efficiency.
2Duration of action of moving object
If a rotary joint is used to supply refrigerant to the rotating cooling unit, then continuous refrigerant supply is achieved, but the device structure becomes more complex and refrigerant leaks increase
Solution Approach 1:
The invention extracts and removes the rotary joint component from the system entirely. By keeping the cooling unit stationary, the need for a rotary joint is eliminated, simplifying the device structure and eliminating the source of refrigerant leaks while maintaining continuous refrigerant supply through fixed piping.
Solution Approach 2:
The invention introduces a stationary cooling unit as an intermediary between the refrigerant supply system and the rotating workpieces. This intermediary allows refrigerant to be supplied through fixed piping without requiring a rotary joint, thus simplifying the overall system structure.
3Reliability
If the cooling unit is disposed inside the chamber, then cooling can be performed, but the structure requires differential evacuation mechanism to prevent refrigerant leaks
Solution Approach 1:
The invention extracts the cooling unit from the vacuum chamber environment, positioning it outside the chamber. This eliminates the need for complex differential evacuation mechanisms and sealing systems, as the cooling unit operates in atmospheric pressure while still effectively cooling the workpieces through radiant heat transfer.
Solution Approach 2:
The invention repositions the cooling unit in a different spatial location - outside the vacuum chamber rather than inside. This dimensional relocation allows the cooling system to operate independently from the vacuum environment, eliminating the need for complex evacuation and sealing mechanisms.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration significantly reduces the risk of refrigerant leaks and enhances cooling efficiency by allowing the cooling unit to absorb radiant heat from the workpieces over its entire surface, while simplifying the device structure and reducing the need for electrical insulation.
Implementation Method 1
the outer circumferential surface of the cylindrical cooling unit functions as a cooling surface that faces the workpieces at all times, absorbs the radiant heat from the workpieces, and cools the workplaces
Data Source
AI summary
A deposition device includes: a cooling unit that cools workpieces; a rotating table main body that rotates around a vertical axis, this rotating table main body having a cooling unit placement portion on which the cooling unit is placed and workpiece placement portions which are arranged so as to surround the periphery of the cooling unit placement portion and on which the workpieces are placed respectively; a lifting mechanism that lifts and lowers the cooling unit, inside the space, between a first position in which the cooling unit is placed on the rotating table main body and a second position in which the cooling unit is spaced upward from the rotating table main body and faces side surfaces of the workpieces placed on the workpiece placement portions; and refrigerant piping attached to the chamber and detachably connected to the cooling unit to supply the refrigerant to the cooling unit.