Substrate Lifting Rod Alignment Using Flange Adjustment Screws
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Solution Overview
Problem
Existing lifting devices for substrates in process chambers, such as those described in U.S. Pat. No. 11,183,418 B2, have a complex design due to the use of multi-part supporting bodies and grooves, which complicates the adjustment of the lifting rod's position.
Innovation Solution
A lifting device with a drive housing flange and adjustment screws that are screwed through openings in the flange, allowing precise adjustment of the lifting rod's position by varying the depth of the screw protrusion, and optionally using elastic pretensioning elements to adjust the gap between the flange and chamber flange.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a multi-part supporting body with grooves is used to adjust the lifting rod position, then the position can be adjusted, but the design becomes relatively complicated
Solution Approach 1:
The supporting body is divided into a drive housing and a drive housing flange as separate components. The adjustment screws are integrated into the drive housing flange, creating a modular structure that simplifies both manufacturing and adjustment operations while maintaining position adjustability
Solution Approach 2:
The adjustment function is extracted from the supporting body structure and implemented through separate adjustment screws that are screwed through the drive housing flange. This separates the adjustment mechanism from the structural support function, reducing overall design complexity
2Manufacturing precision
If adjustment screws are screwed through the drive housing flange at differing depths, then precise adjustment of the lifting rod position is achieved, but the structure requires additional openings and screw mechanisms
Solution Approach 1:
The drive housing flange serves multiple functions: it provides structural support, contains the adjustment screw receiving openings, and allows access for position adjustment. The adjustment screws both secure the flange and enable precise position adjustment, combining fastening and adjustment functions in a single mechanism
Solution Approach 2:
The adjustment screws can be screwed in or out to varying depths, providing dynamic adjustability of the lifting rod position. This allows continuous fine-tuning of the lifting movement path position along the linear axis, achieving high manufacturing precision through a simple screw mechanism
Data Source
AI summary
A lifting device for lowering a substrate onto and for lifting it off from a substrate carrier in a process chamber. The lifting device had a lifting rod and a linear drive, for moving the lifting rod along a linear lifting movement path, and a plurality of adjustment screws for adjusting the position of the lifting movement path. The lifting device has a drive housing for the linear drive, and a drive housing flange and a passage opening surrounded by this flange. The lifting rod is guided through the passage opening, and the adjustment screws are each screwed through an adjustment screw receiving opening in the drive housing flange. The adjustment screw receiving openings are spaced apart in the drive housing flange, and a protrusion of the respective adjustment screw over the drive housing flange is adjustable by screwing that adjustment screw through the respective receiving opening at differing depths.