Light-Emitting Element Inspection Using Combined PL and EL Analysis

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Solution Overview

Problem

Existing display device manufacturing processes lack effective methods for inspecting light-emitting elements to assess reliability, degradation, and performance, particularly in terms of electrical and optical characteristics, which affects the quality and efficiency of the final product.

Innovation Solution

A method and apparatus that simultaneously acquire and synthesize electrical and optical information from light-emitting elements using a laser to induce photoluminescence and a driving signal to induce electroluminescence, allowing for comprehensive analysis of degradation and performance, including equivalent circuit analysis before and after an aging process.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If only electrical information is acquired during inspection, then the inspection process is simple, but the reliability assessment and degradation analysis are insufficient

Engineering Contradiction:
Improvelight-emitting element reliabilityVSAvoidinspection process complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent combines electrical information acquisition (through electrical probes contacting the light-emitting element) and optical information acquisition (through laser irradiation and light detection) into a single integrated inspection process. Both types of information are measured simultaneously on the same sample under the same conditions, enabling comprehensive reliability assessment without requiring separate inspection procedures.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The inspection system is designed to perform multiple functions: it can measure electrical characteristics (current, voltage, resistance), optical characteristics (photoluminescence intensity, electroluminescence intensity), and degradation states. This multi-functional approach allows a single inspection apparatus to gather comprehensive data for reliability assessment, reducing the need for multiple specialized devices.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Productivity

If separate inspection processes are used for electrical and optical characteristics, then each process can be optimized, but the overall inspection time increases and process efficiency decreases

Engineering Contradiction:
Improveinspection process efficiencyVSAvoidinspection time
Core Design Contradiction:
ProductivityVSLoss of time

Solution Approach 1:

The patent merges electrical measurement and optical measurement into a concurrent process where both types of data are collected during the same inspection cycle. The electrical probes and optical detection systems operate simultaneously on the light-emitting element, eliminating the need for sequential inspections and significantly reducing total inspection time.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The inspection process maintains continuous measurement of both electrical and optical characteristics throughout the inspection period. By keeping both measurement systems active and synchronized, the patent ensures that no useful data collection time is lost between separate inspection stages, maximizing productivity.

Inventive Principle:
Principle #20Continuity of useful action

3Measurement precision

If degradation analysis is performed without synthesizing electrical and optical information, then the analysis process is simpler, but the accuracy and reliability of degradation detection are reduced

Engineering Contradiction:
Improvedegradation detection accuracyVSAvoidanalysis process complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent synthesizes electrical information (such as current-voltage characteristics and resistance changes) with optical information (such as photoluminescence and electroluminescence intensity variations) to create a comprehensive degradation profile. By correlating changes in both electrical and optical parameters, the system achieves more accurate degradation detection than either measurement type could provide alone.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The inspection system uses feedback from both electrical and optical measurements to continuously refine degradation assessment. Changes in electrical characteristics provide feedback on material degradation, while optical measurements provide complementary feedback on light emission quality. The synthesis of both feedback streams enables more precise identification and characterization of degradation mechanisms.

Inventive Principle:
Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances the reliability of light-emitting elements by clearly detecting degradation positions, improving analysis results, and increasing process efficiency through thorough and quantitative evaluation of electrical and optical characteristics.

Implementation Method 1

applying a laser to the light-emitting element sample to cause the light-emitting element sample to emit photoluminescence (PL) light

Methodology Applied
Scientific EffectPhotoluminescence: Photoluminescence

Implementation Method 2

applying a driving signal to the light-emitting element sample to acquire the electrical information of the light-emitting element sample and cause the light-emitting element sample to emit electroluminescence (EL) light

Methodology Applied
Scientific EffectElectroluminescence: Electroluminescence

Data Source

PatentUS20260056242A1Method of inspecting light-emitting element sample, apparatus for inspecting light-emitting element sample, method of manufacturing display device, and electronic device including display device
Publication Date: 2026.02.26 SAMSUNG DISPLAY CO LTD
  • US20260056242A1 patent drawing
  • US20260056242A1 patent drawing
  • US20260056242A1 patent drawing

AI summary

A method of inspecting a light-emitting element sample, an apparatus for inspecting a light-emitting element sample, a method of manufacturing a display device, and an electronic device comprising a display device are provided. The method of inspecting the light-emitting element sample includes: acquiring electrical information and optical information on the light-emitting element sample; and analyzing the light-emitting element sample by synthesizing the electrical information and the optical information.